Control of Oxygen Content with Oxygen Gas Introduction in Cr(N,O) Thin Films Prepared by Pulsed Laser Deposition

Author(s):  
K. Suzuki ◽  
T. Endo ◽  
T. Fukushima ◽  
A. Sato ◽  
T. Suzuki ◽  
...  
2006 ◽  
Vol 515 (4) ◽  
pp. 2161-2166 ◽  
Author(s):  
Tsuneo Suzuki ◽  
Jun Inoue ◽  
Hajime Saito ◽  
Makoto Hirai ◽  
Hisayuki Suematsu ◽  
...  

1998 ◽  
Vol 127-129 ◽  
pp. 1011-1016 ◽  
Author(s):  
J. Garcı́a López ◽  
D.H.A. Blank ◽  
H. Rogalla

2002 ◽  
Vol 728 ◽  
Author(s):  
Kenji Ebihara ◽  
Tamiko Ohshima ◽  
Tomoaki Ikegami ◽  
Raj K. Thareja

AbstractZinc Oxide (ZnO) thin films have been deposited on silicon (100), quartz glass, sapphire (0001), and glass substrates by pulsed laser deposition over a range of process conditions such as versus ambient oxygen gas pressure and substrate temperature. Photoluminescence measurements have been carried out to characterize ZnO thin films for optical device applications. We have also studied the influence of the process conditions on crystal structure and morphology of the grown films. Ultraviolet luminescence near the band gap at 3.25 eV was obtained from the optical pumped grown films. And ZnO thin films deposited on sapphire single crystal substrates exhibited strong stimulated emission around 3.12 eV with increasing pumping energy. ZnO thin films deposited at ambient oxygen gas pressure of 5 mTorr and a substrate temperature of 550 °C were predominantly c-axis oriented regardless of substrate material. The crystallite size of 22.7-49.8 nm was estimated using Scherrer's formula. AFM images of films grown on sapphire substrates display hexagonally shaped grains at various sizes.


2013 ◽  
Vol 54 (7) ◽  
pp. 1140-1144 ◽  
Author(s):  
Kazuma Suzuki ◽  
Toshiyuki Endo ◽  
Teruhisa Fukushima ◽  
Aoi Sato ◽  
Tsuneo Suzuki ◽  
...  

2005 ◽  
Vol 884 ◽  
Author(s):  
A. Rougier ◽  
X. Darok ◽  
V.V. Bhat ◽  
L. Aymard ◽  
G.A. Nazri ◽  
...  

AbstractMg-based thin films were successfully grown by Pulsed Laser Deposition. Dramatic optical changes were observed depending on the conditions of deposition. Films grown in vacuum were shiny metallic whereas the ones grown in a Ar/H2 gas mixture were highly transparent. Ex situ hydrogenation, by annealing the films at 200 °C in 15 bars of hydrogen, led to similar metallictransparent transformation. Mg-Cx (x ≤ 20 %) films show a faster hydrogenation associated with a significant decrease in oxygen content by carbon addition.


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