Synthesis and Characterization of Amorphous Silicon Nitride Nanoparticals and α-Silicon Nitride Nanowires

2015 ◽  
pp. 317-323
Author(s):  
Qi Wang ◽  
Jungang Hou ◽  
Hongmin Zhu
Keyword(s):  
Silicon Nitride ◽  
Amorphous Silicon ◽  
Synthesis And Characterization ◽  
Amorphous Silicon Nitride

Characterization of fluorinated hydrogenated amorphous silicon nitride (a‐SiNx:H) alloys

1994 ◽  
Vol 76 (2) ◽  
pp. 1055-1061 ◽  
Author(s):  
J. M. Shen ◽  
C. Palsule ◽  
S. Gangopadhyay ◽  
H. A. Naseem ◽  
S. Kizzar ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Amorphous Silicon Nitride ◽  
Hydrogenated Amorphous

Synthesis and Characterization of Halogenated Amorphous Silicon via a Novel Glow Discharge Process

1998 ◽  
Vol 10 (1) ◽  
pp. 366-371 ◽  
Author(s):  
Oscar H. Giraldo ◽  
William S. Willis ◽  
Manuel Márquez ◽  
Steven L. Suib ◽  
Yuji Hayashi ◽  
...  
Keyword(s):  
Glow Discharge ◽  
Amorphous Silicon ◽  
Synthesis And Characterization ◽  
Discharge Process
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