ChemInform Abstract: VERY THIN SILICON NITRIDE FILMS GROWN BY DIRECT THERMAL REACTION WITH NITROGEN

1978 ◽  
Vol 9 (28) ◽  
Author(s):  
T. ITO ◽  
S. HIJIYA ◽  
T. NOZAKI ◽  
H. ARAKAWA ◽  
M. SHINODA ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Thermal Reaction ◽  
Silicon Nitride Films ◽  
Thin Silicon

Very Thin Silicon Nitride Films Grown by Direct Thermal Reaction with Nitrogen

1978 ◽  
Vol 125 (3) ◽  
pp. 448-452 ◽  
Author(s):  
T. Ito ◽  
S. Hijiya ◽  
T. Nozaki ◽  
H. Arakawa ◽  
M. Shinoda ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Thermal Reaction ◽  
Silicon Nitride Films ◽  
Thin Silicon

Ultra thin silicon nitride films on Si(100) studied with core level photoemission

2008 ◽  
Vol 602 (13) ◽  
pp. 2315-2324 ◽  
Author(s):  
A. Bahari ◽  
P. Morgen ◽  
Z.S. Li
Keyword(s):  
Silicon Nitride ◽  
Core Level ◽  
Silicon Nitride Films ◽  
Thin Silicon

Density of as-deposited and annealed thin silicon nitride films

1993 ◽  
Vol 26 (4) ◽  
pp. 713-716 ◽  
Author(s):  
J C Bruyere ◽  
C Savall ◽  
B Reynes ◽  
M Brunel ◽  
L Ortega
Keyword(s):  
Silicon Nitride ◽  
Silicon Nitride Films ◽  
Thin Silicon

POTENTIOSTATIC TESTING OF THIN SILICON NITRIDE FILMS

1995 ◽  
Vol 137 (1) ◽  
pp. 23-32
Author(s):  
R. ULRICH ◽  
G. ZHAO ◽  
W. BROWN
Keyword(s):  
Silicon Nitride ◽  
Silicon Nitride Films ◽  
Thin Silicon

Thin silicon nitride films to increase resolution in e-beam lithography

1993 ◽  
Author(s):  
Elizabeth A. Dobisz ◽  
Christie R. Marrian ◽  
R. E. Salvino ◽  
Mario G. Ancona ◽  
Kee W. Rhee ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Silicon Nitride Films ◽  
Thin Silicon

Conduction Mechanisms in Very Thin Silicon Nitride Films

1973 ◽  
Vol 120 (3) ◽  
pp. 423 ◽  
Author(s):  
Juan H. Sanchez-Lassise ◽  
J. R. Yeargan
Keyword(s):  
Silicon Nitride ◽  
Silicon Nitride Films ◽  
Conduction Mechanisms ◽  
Thin Silicon
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