Plasma Deposition and Characterization of Thin Silicon‐Rich Silicon Nitride Films

1987 ◽  
Vol 134 (9) ◽  
pp. 2324-2329 ◽  
Author(s):  
S. V. Nguyen ◽  
S. Fridmann
Keyword(s):  
Silicon Nitride ◽  
Plasma Deposition ◽  
Silicon Nitride Films ◽  
Thin Silicon

Characterization of low pressure chemically vapour- deposited thin silicon nitride films

1984 ◽  
Vol 122 (2) ◽  
pp. 153-163 ◽  
Author(s):  
L.I. Popova ◽  
B.Z. Antov ◽  
A.V. Shopov ◽  
M.S. Sotirova ◽  
G.D. Beshkov ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Low Pressure ◽  
Silicon Nitride Films ◽  
Thin Silicon

Spectroellipsometric characterization of thin silicon nitride films

1998 ◽  
Vol 313-314 ◽  
pp. 298-302 ◽  
Author(s):  
Zhong-Tao Jiang ◽  
Tomuo Yamaguchi ◽  
Mitsuru Aoyama ◽  
Yoichiro Nakanishi ◽  
Leo Asinovsky
Keyword(s):  
Silicon Nitride ◽  
Silicon Nitride Films ◽  
Thin Silicon

ChemInform Abstract: VERY THIN SILICON NITRIDE FILMS GROWN BY DIRECT THERMAL REACTION WITH NITROGEN

1978 ◽  
Vol 9 (28) ◽  
Author(s):  
T. ITO ◽  
S. HIJIYA ◽  
T. NOZAKI ◽  
H. ARAKAWA ◽  
M. SHINODA ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Thermal Reaction ◽  
Silicon Nitride Films ◽  
Thin Silicon

Ultra thin silicon nitride films on Si(100) studied with core level photoemission

2008 ◽  
Vol 602 (13) ◽  
pp. 2315-2324 ◽  
Author(s):  
A. Bahari ◽  
P. Morgen ◽  
Z.S. Li
Keyword(s):  
Silicon Nitride ◽  
Core Level ◽  
Silicon Nitride Films ◽  
Thin Silicon

Density of as-deposited and annealed thin silicon nitride films

1993 ◽  
Vol 26 (4) ◽  
pp. 713-716 ◽  
Author(s):  
J C Bruyere ◽  
C Savall ◽  
B Reynes ◽  
M Brunel ◽  
L Ortega
Keyword(s):  
Silicon Nitride ◽  
Silicon Nitride Films ◽  
Thin Silicon
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