ScienceGate
Advanced Search
Author Search
Journal Finder
Blog
Sign in / Sign up
ScienceGate
Search
Author Search
Journal Finder
Blog
Sign in / Sign up
POTENTIOSTATIC TESTING OF THIN SILICON NITRIDE FILMS
Chemical Engineering Communications
◽
10.1080/00986449508936363
◽
1995
◽
Vol 137
(1)
◽
pp. 23-32
Author(s):
R. ULRICH
◽
G. ZHAO
◽
W. BROWN
Keyword(s):
Silicon Nitride
◽
Silicon Nitride Films
◽
Thin Silicon
Download Full-text
Related Documents
Cited By
References
ChemInform Abstract: VERY THIN SILICON NITRIDE FILMS GROWN BY DIRECT THERMAL REACTION WITH NITROGEN
Chemischer Informationsdienst
◽
10.1002/chin.197828033
◽
1978
◽
Vol 9
(28)
◽
Author(s):
T. ITO
◽
S. HIJIYA
◽
T. NOZAKI
◽
H. ARAKAWA
◽
M. SHINODA
◽
...
Keyword(s):
Silicon Nitride
◽
Thermal Reaction
◽
Silicon Nitride Films
◽
Thin Silicon
Download Full-text
Spectroscopic Investigation of the Synthesis of Thin Silicon Nitride Films on Silicon Single-Crystal Wafers via Ammonia-Assisted Pyrolysis of Organosilicon Polymers
Chemistry of Materials
◽
10.1021/cm000522d
◽
2001
◽
Vol 13
(2)
◽
pp. 655-661
◽
Cited By ~ 9
Author(s):
Mihai Scarlete
◽
Nancy McCourt
◽
Ian S. Butler
◽
John F. Harrod
Keyword(s):
Silicon Nitride
◽
Single Crystal
◽
Spectroscopic Investigation
◽
Silicon Single Crystal
◽
Silicon Nitride Films
◽
Thin Silicon
◽
Organosilicon Polymers
Download Full-text
Ultra thin silicon nitride films on Si(100) studied with core level photoemission
Surface Science
◽
10.1016/j.susc.2008.05.013
◽
2008
◽
Vol 602
(13)
◽
pp. 2315-2324
◽
Cited By ~ 14
Author(s):
A. Bahari
◽
P. Morgen
◽
Z.S. Li
Keyword(s):
Silicon Nitride
◽
Core Level
◽
Silicon Nitride Films
◽
Thin Silicon
Download Full-text
Density of as-deposited and annealed thin silicon nitride films
Journal of Physics D Applied Physics
◽
10.1088/0022-3727/26/4/029
◽
1993
◽
Vol 26
(4)
◽
pp. 713-716
◽
Cited By ~ 7
Author(s):
J C Bruyere
◽
C Savall
◽
B Reynes
◽
M Brunel
◽
L Ortega
Keyword(s):
Silicon Nitride
◽
Silicon Nitride Films
◽
Thin Silicon
Download Full-text
Ultra-thin silicon nitride films on Si by jet vapor deposition
1995 International Symposium on VLSI Technology Systems and Applications Proceedings of Technical Papers VTSA-95
◽
10.1109/vtsa.1995.524632
◽
2002
◽
Cited By ~ 2
Author(s):
X.W. Wang
◽
T.P. Ma
◽
G.-J. Cui
◽
T. Tamagawa
◽
B.L. Halpern
◽
...
Keyword(s):
Silicon Nitride
◽
Vapor Deposition
◽
Silicon Nitride Films
◽
Jet Vapor Deposition
◽
Thin Silicon
Download Full-text
Study of thin silicon nitride films toy isothermal depolarization of mnos structures
phys stat sol (a)
◽
10.1002/pssa.2210650121
◽
1981
◽
Vol 65
(1)
◽
pp. 177-187
◽
Cited By ~ 8
Author(s):
V. M. Efimov
Keyword(s):
Silicon Nitride
◽
Silicon Nitride Films
◽
Thin Silicon
Download Full-text
Thin silicon nitride films to increase resolution in e-beam lithography
10.1117/12.146500
◽
1993
◽
Author(s):
Elizabeth A. Dobisz
◽
Christie R. Marrian
◽
R. E. Salvino
◽
Mario G. Ancona
◽
Kee W. Rhee
◽
...
Keyword(s):
Silicon Nitride
◽
Silicon Nitride Films
◽
Thin Silicon
Download Full-text
Conduction Mechanisms in Very Thin Silicon Nitride Films
Journal of The Electrochemical Society
◽
10.1149/1.2403469
◽
1973
◽
Vol 120
(3)
◽
pp. 423
◽
Cited By ~ 9
Author(s):
Juan H. Sanchez-Lassise
◽
J. R. Yeargan
Keyword(s):
Silicon Nitride
◽
Silicon Nitride Films
◽
Conduction Mechanisms
◽
Thin Silicon
Download Full-text
Plasma Deposition and Characterization of Thin Silicon‐Rich Silicon Nitride Films
Journal of The Electrochemical Society
◽
10.1149/1.2100879
◽
1987
◽
Vol 134
(9)
◽
pp. 2324-2329
◽
Cited By ~ 24
Author(s):
S. V. Nguyen
◽
S. Fridmann
Keyword(s):
Silicon Nitride
◽
Plasma Deposition
◽
Silicon Nitride Films
◽
Thin Silicon
Download Full-text
Thermal conduction normal to thin silicon nitride films on diamond and GaN
Fourteenth Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm)
◽
10.1109/itherm.2014.6892414
◽
2014
◽
Cited By ~ 2
Author(s):
Jungwan Cho
◽
Kenneth K. Chu
◽
Pane C. Chao
◽
Craig McGray
◽
Mehdi Asheghi
◽
...
Keyword(s):
Silicon Nitride
◽
Thermal Conduction
◽
Silicon Nitride Films
◽
Thin Silicon
Download Full-text
Sign in / Sign up
Close
Export Citation Format
Close
Share Document
Close