ChemInform Abstract: Plasma-Assisted Chemical Vapor Deposition and Characterization of Boron Nitride Films.

ChemInform ◽  
2010 ◽  
Vol 25 (41) ◽  
pp. no-no
Author(s):  
S. V. NGUYEN ◽  
T. NGUYEN ◽  
H. TREICHEL ◽  
O. SPINDLER
Keyword(s):  
Chemical Vapor Deposition ◽  
Boron Nitride ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Boron Nitride Films

Plasma‐Assisted Chemical Vapor Deposition and Characterization of Boron Nitride Films

1994 ◽  
Vol 141 (6) ◽  
pp. 1633-1638 ◽  
Author(s):  
S. V. Nguyen ◽  
T. Nguyen ◽  
H. Treichel ◽  
O. Spindler
Keyword(s):  
Chemical Vapor Deposition ◽  
Boron Nitride ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Boron Nitride Films

scholarly journals Plasma enhanced chemical vapor deposition and characterization of boron nitride gate insulators on InP

1991 ◽  
Vol 70 (8) ◽  
pp. 4366-4370 ◽  
Author(s):  
A. Bath ◽  
P. J. van der Put ◽  
J. G. M. Becht ◽  
J. Schoonman ◽  
B. Lepley
Keyword(s):  
Chemical Vapor Deposition ◽  
Boron Nitride ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Gate Insulators

Thermal Stability of Cubic Boron Nitride Films Deposited by Chemical Vapor Deposition.

ChemInform ◽  
2007 ◽  
Vol 38 (2) ◽  
Author(s):  
J. Yu ◽  
Z. Zheng ◽  
H. C. Ong ◽  
K. Y. Wong ◽  
S. Matsumoto ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Chemical Vapor Deposition ◽  
Boron Nitride ◽  
Vapor Deposition ◽  
Cubic Boron Nitride ◽  
Chemical Vapor ◽  
Boron Nitride Films ◽  
Thermal Stability Of
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