ChemInform Abstract: Characterization of TiN Films Prepared by Electron Shower, Arc Ion- Plating and Sputtering Methods.

ChemInform ◽  
2010 ◽  
Vol 26 (47) ◽  
pp. no-no
Author(s):  
H. YUMOTO ◽  
K. KANEKO ◽  
M. ISHIHARA ◽  
K. AKASI ◽  
T. KANEKO
1995 ◽  
Vol 5 (4) ◽  
pp. 191-198 ◽  
Author(s):  
H. Yumoto ◽  
K. Kaneko ◽  
M. Ishihara ◽  
K. Akasi ◽  
T. Kaneko

Author(s):  
Se Weon Choi ◽  
Young Chan Kim ◽  
Se Hun Chang ◽  
Ik Hyun Oh ◽  
Chang Seog Kang
Keyword(s):  

2006 ◽  
Vol 118 ◽  
pp. 311-316 ◽  
Author(s):  
Eun Young Choi ◽  
Chul Sik Jang ◽  
Myung Chang Kang ◽  
Kwang Ho Kim

Ternary Ti-Cx-N1-x coatings were deposited on stainless steel substrates by arc ion plating (AIP) technique using Ti target at the temperature of 300 with a negative substrate bias voltage of -25 V. The carbon content in Ti-Cx-N1-x coatings linearly increased with increasing CH4/(CH4+N2) gas flow ratio at a constant arc current of 60 A. The microstructure and mechanical properties such as micro-hardness and average friction coefficient of Ti-Cx-N1-x coatings were investigated as a function of carbon content. As the carbon content in Ti-Cx-N1-x coatings increased, the microhardness values of Ti-Cx-N1-x coatings increased from 20 GPa for TiN coatings and reached the maximum value of approximately 32 GPa at x=0.52 in Ti-Cx-N1-x coatings. The variation of microhardness of Ti-Cx-N1-x coatings had a relationship with the change of residual stress. The average friction coefficient of Ti-Cx-N1-x coatings largely decreased with increasing carbon content.


Vacuum ◽  
2004 ◽  
Vol 74 (3-4) ◽  
pp. 647-651 ◽  
Author(s):  
Tatsuya Matsue ◽  
Takao Hanabusa ◽  
Yasukazu Ikeuchi

2015 ◽  
Vol 28 (8) ◽  
pp. 984-993 ◽  
Author(s):  
Yan-Hui Zhao ◽  
Wen-Jin Yang ◽  
Chao-Qian Guo ◽  
Yu-Qiu Chen ◽  
Bao-Hai Yu ◽  
...  

1999 ◽  
Vol 65 (635) ◽  
pp. 1635-1641 ◽  
Author(s):  
Yasuhiro MIKI ◽  
Tadashi TANIGUCHI ◽  
Kazuya KUSAKA ◽  
Takao HANABUSA ◽  
Eiji MAITANI

1994 ◽  
Vol 68-69 ◽  
pp. 141-145 ◽  
Author(s):  
G.H. Kang ◽  
H. Uchida ◽  
E.S. Koh

2019 ◽  
Vol 98 ◽  
pp. 107473 ◽  
Author(s):  
Rui Lan ◽  
Zhifeng Ma ◽  
Chunji Wang ◽  
Guoying Lu ◽  
Yanyan Yuan ◽  
...  

Author(s):  
K. AKARI ◽  
H. TAMAGAKI ◽  
T. KUMAKIRI ◽  
K. TSUJI ◽  
E.S. KOH ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document