ABSTRACTMulti-fold stacks of In0.6Ga0.4As quantum dots embedded into a GaAs matrix were investigated by means of x-ray diffuse scattering. The measurements were done with synchrotron radiation using different diffraction geometries. Data evaluation was based on comparison with simulated distributions of x-ray diffuse scattering. For the samples under consideration ((001) surface) there is no difference in dot extension along [110] and [-110] and no directional ordering. The measurements easily allow the determination of the average indium amount in the wetting layers. Data evaluation by simulation of x-ray diffuse scattering gives an increase of Incontent from the dot bottom to the dot top.
Precise and nondestructive characterization of a ‘buried’ nanostructure in a polymer thin film using synchrotron radiation ultra-small angle X-ray scattering