Nucleation of atomic-layer-deposited HfO2 films, and evolution of their microstructure, studied by grazing incidence small angle x-ray scattering using synchrotron radiation

M. L. Green; A. J. Allen; X. Li; J. Wang; J. Ilavsky; A. Delabie; R. L. Puurunen; B. Brijs

doi:10.1063/1.2164417

Nucleation of atomic-layer-deposited HfO2 films, and evolution of their microstructure, studied by grazing incidence small angle x-ray scattering using synchrotron radiation

Applied Physics Letters ◽

10.1063/1.2164417 ◽

2006 ◽

Vol 88 (3) ◽

pp. 032907 ◽

Cited By ~ 11

Author(s):

M. L. Green ◽

A. J. Allen ◽

X. Li ◽

J. Wang ◽

J. Ilavsky ◽

...

Keyword(s):

Synchrotron Radiation ◽

Small Angle ◽

Atomic Layer ◽

Grazing Incidence ◽

X Ray ◽

X Ray Scattering ◽

Ray Scattering

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Structural Analysis of Microphase Separated Interface in an ABC-Type Triblock Terpolymer by Combining Methods of Synchrotron-Radiation Grazing Incidence Small-Angle X-ray Scattering and Electron Microtomography

Macromolecules ◽

10.1021/ma502596a ◽

2015 ◽

Vol 48 (8) ◽

pp. 2697-2705 ◽

Cited By ~ 13

Author(s):

Ryohei Ishige ◽

Takeshi Higuchi ◽

Xi Jiang ◽

Kazuki Mita ◽

Hiroki Ogawa ◽

...

Keyword(s):

Structural Analysis ◽

Synchrotron Radiation ◽

Small Angle ◽

Grazing Incidence ◽

X Ray ◽

X Ray Scattering ◽

Combining Methods ◽

Ray Scattering

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Understanding the effect of nitrogen plasma exposure on plasma assisted atomic layer epitaxy of InN monitored by real time grazing incidence small angle x-ray scattering

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.5063340 ◽

2019 ◽

Vol 37 (2) ◽

pp. 020910 ◽

Cited By ~ 4

Author(s):

Neeraj Nepal ◽

Virginia R. Anderson ◽

Scooter D. Johnson ◽

Brian P. Downey ◽

David J. Meyer ◽

...

Keyword(s):

Real Time ◽

Small Angle ◽

Atomic Layer ◽

Grazing Incidence ◽

Nitrogen Plasma ◽

Atomic Layer Epitaxy ◽

Plasma Exposure ◽

X Ray ◽

X Ray Scattering ◽

Ray Scattering

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Grazing-Incidence Small-Angle X-Ray Scattering (GISAXS) and Grazing-Incidence Wide-Angle X-Ray Scattering (GIWAXS) Comparative Study on Malignant and Benign Human Cancer Cells and Tissues under Synchrotron Radiation

10.36959/898/688 ◽

2019 ◽

Vol 1 (1) ◽

Cited By ~ 1

Author(s):

Alireza Heidari

Keyword(s):

Synchrotron Radiation ◽

Cancer Cells ◽

Small Angle ◽

Human Cancer ◽

Grazing Incidence ◽

Wide Angle ◽

X Ray ◽

Human Cancer Cells ◽

X Ray Scattering ◽

Ray Scattering

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Grazing incidence small angle X-ray scattering from nanoparticles: beyond classical analysis approximations

Acta Crystallographica Section A Foundations of Crystallography ◽

10.1107/s0108767305082607 ◽

2005 ◽

Vol 61 (a1) ◽

pp. c411-c411

Author(s):

R. Lazzari ◽

G. Renaud ◽

F. Leroy

Keyword(s):

Small Angle ◽

Grazing Incidence ◽

Classical Analysis ◽

X Ray ◽

X Ray Scattering ◽

Ray Scattering

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Precise and nondestructive characterization of a ‘buried’ nanostructure in a polymer thin film using synchrotron radiation ultra-small angle X-ray scattering

Polymer Journal ◽

10.1038/pj.2012.133 ◽

2012 ◽

Vol 45 (3) ◽

pp. 307-312 ◽

Cited By ~ 3

Author(s):

Takamichi Shinohara ◽

Tomoko Shirahase ◽

Daiki Murakami ◽

Taiki Hoshino ◽

Moriya Kikuchi ◽

...

Keyword(s):

Thin Film ◽

Synchrotron Radiation ◽

Small Angle ◽

Polymer Thin Film ◽

X Ray ◽

X Ray Scattering ◽

Nondestructive Characterization ◽

Ray Scattering

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A general model for estimating the ordering of mesoporous film by grazing incidence small angle X-ray scattering

Journal of Applied Physics ◽

10.1063/1.4875662 ◽

2014 ◽

Vol 115 (20) ◽

pp. 204311 ◽

Cited By ~ 2

Author(s):

Nie Zhao ◽

Chunming Yang ◽

Qian Zhang ◽

Xueming Lu ◽

Yuzhu Wang ◽

...

Keyword(s):

Small Angle ◽

General Model ◽

Grazing Incidence ◽

X Ray ◽

X Ray Scattering ◽

Mesoporous Film ◽

Ray Scattering

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Grazing incidence small angle x-ray scattering from free-standing nanostructures

Journal of Applied Physics ◽

10.1063/1.371724 ◽

1999 ◽

Vol 86 (12) ◽

pp. 6763-6769 ◽

Cited By ~ 153

Author(s):

Markus Rauscher ◽

Rogerio Paniago ◽

Hartmut Metzger ◽

Zoltan Kovats ◽

Jan Domke ◽

...

Keyword(s):

Small Angle ◽

Grazing Incidence ◽

Free Standing ◽

X Ray ◽

X Ray Scattering ◽

Ray Scattering

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Erratum: “New reactor dedicated to in operando studies of model catalysts by means of surface x-ray diffraction and grazing incidence small angle x-ray scattering” [Rev. Sci. Instrum. 78, 083902 (2007)]

Review of Scientific Instruments ◽

10.1063/1.2798532 ◽

2007 ◽

Vol 78 (10) ◽

pp. 109902 ◽

Cited By ~ 2

Author(s):

M.-C. Saint-Lager ◽

A. Bailly ◽

P. Dolle ◽

R. Baudoing-Savois ◽

P. Taunier ◽

...

Keyword(s):

Small Angle ◽

Grazing Incidence ◽

Model Catalysts ◽

X Ray Diffraction ◽

X Ray ◽

X Ray Scattering ◽

In Operando ◽

Operando Studies ◽

Ray Scattering

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Thermal quenching sample chamber for grazing incidence small angle x-ray scattering studies of polymer films

Review of Scientific Instruments ◽

10.1063/1.2814023 ◽

2007 ◽

Vol 78 (11) ◽

pp. 113910 ◽

Cited By ~ 1

Author(s):

M. A. Singh ◽

M. N. Groves ◽

M. S. Müller ◽

I. J. Stahlbrand ◽

D.-M. Smilgies

Keyword(s):

Polymer Films ◽

Small Angle ◽

Thermal Quenching ◽

Grazing Incidence ◽

X Ray ◽

X Ray Scattering ◽

Sample Chamber ◽

Ray Scattering

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A grazing incidence small-angle x-ray scattering analysis on capped Ge nanodots in layer structures

Journal of Physics Condensed Matter ◽

10.1088/0953-8984/22/47/474003 ◽

2010 ◽

Vol 22 (47) ◽

pp. 474003 ◽

Cited By ~ 7

Author(s):

Hiroshi Okuda ◽

Masayuki Kato ◽

Keiji Kuno ◽

Shojiro Ochiai ◽

Noritaka Usami ◽

...

Keyword(s):

Small Angle ◽

Grazing Incidence ◽

X Ray ◽

X Ray Scattering ◽

Layer Structures ◽

Ray Scattering

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