Film Stress of Amorphous Hydrogenated Carbon on Biaxially Oriented Polyethylene Terephthalate

2015 ◽  
Vol 12 (9) ◽  
pp. 896-904 ◽  
Author(s):  
Hendrik Bahre ◽  
Henrik Behm ◽  
Dario Grochla ◽  
Marc Böke ◽  
Rainer Dahlmann ◽  
...  
1984 ◽  
Vol 16 (2) ◽  
pp. 96-99
Author(s):  
S. L. Pakshver ◽  
S. A. Baranova ◽  
�. M. Aizenshtein ◽  
L. S. Gerasimova ◽  
S. S. Aleksandriiskii

1999 ◽  
Vol 565 ◽  
Author(s):  
A. D. Glew ◽  
M. A. Cappelli ◽  
M. N. Touzelbaev ◽  
Y. Hu

AbstractIn situ observation of the plasma properties during deposition of fluorinated amorphous hydrogenated carbon (FLAC) and unfluorinated amorphous hydrogenated carbon are performed. The relationship between film properties and impinging ion energy and incident ion momentum is discussed within the framework of existing models of diamond-like carbon (DLC) formation. The DLC films are deposited in a low pressure radio frequency discharge operating at 13.57 MHz with methane and carbon tetra-fluoride as the source gases. Thermostability, stress, and mechanical properties are investigated. The films are elevated to 400 degrees C in order to investigate thermostability. Thin film stress and nano-hardness are also studied. The film density is investigated by gravimetric methods. The fluorinated film stoichiometry is explored with x-ray photoelectron spectroscopy and Fourier transform infrared spectroscopy.


1968 ◽  
Vol 18 (153) ◽  
pp. 483-502 ◽  
Author(s):  
N. Brown ◽  
R. A. Duckett ◽  
I. M. Ward

1986 ◽  
Vol 72 (8) ◽  
pp. 1189-1196 ◽  
Author(s):  
Atsuo TANAKA ◽  
Tetsuhiro HANAFUSA ◽  
Harunori KOJYO ◽  
Tsuneo INUI

Polymer ◽  
2004 ◽  
Vol 45 (16) ◽  
pp. 5619-5628 ◽  
Author(s):  
Sushil N. Dhoot ◽  
Benny D. Freeman ◽  
Mark E. Stewart

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