Transmission electron microscopy study for investigating high-temperature reliability of Ti10 W90 -based and Ta-based diffusion barriers up to 600°C

2015 ◽  
Vol 213 (4) ◽  
pp. 1055-1062
Author(s):  
Nando Budhiman ◽  
Ulrich Schürmann ◽  
Björn Jensen ◽  
Steffen Chemnitz ◽  
Lorenz Kienle ◽  
...  
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