Transmission electron microscopy study of the failure mechanism of the diffusion barriers (TiN and TaN) between Al and Cu
1989 ◽
Vol 111
◽
pp. 177-180
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2002 ◽
Vol 82
(4)
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pp. 735-749
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1996 ◽
Vol 74
(2)
◽
pp. 57-66
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1994 ◽
Vol 70
(5)
◽
pp. 1077-1094
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