Investigation of Ion Channeling and Scattering for Single‐Ion Implantation with High Spatial Resolution
2019 ◽
Vol 216
(21)
◽
pp. 1900528
◽
2014 ◽
Vol 66
(1)
◽
pp. 10101
◽
Keyword(s):
1986 ◽
Vol 44
◽
pp. 518-519
Keyword(s):
1996 ◽
Vol 54
◽
pp. 154-155
Keyword(s):
Keyword(s):
2013 ◽
Vol 67
(3)
◽
pp. J108-J115
2018 ◽