Impurity Profiles at Multi-Pulse Electron-Beam Annealing of Ion-Implanted Silicon
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2013 ◽
Vol 63
(1T)
◽
pp. 292-294
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2013 ◽
Vol 25
(8)
◽
pp. 2125-2129
◽
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2012 ◽
Vol 112
(2)
◽
pp. 280-288
◽
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