MEMS in RF Filter Applications: Thin-film Bulk Acoustic Wave Technology
2003 ◽
Vol 12
(1)
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pp. 175-210
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2014 ◽
Vol 105
(16)
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pp. 162910
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Andrey Kozyrev
◽
Anatoly Mikhailov
◽
Sergey Ptashnik
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Peter K. Petrov
◽
Neil Alford
2017 ◽
Vol 56
(1)
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pp. 11-19
◽
Jing Liu
◽
Tingfeng Ma
◽
Jianke Du
◽
Ji Wang
◽
Jiashi Yang
2020 ◽
Vol 10
(7)
◽
pp. 075002
Xiaoyuan Bai
◽
Yao Shuai
◽
Lu Lv
◽
Ying Xing
◽
Jiaoling Zhao
◽
...
2002 ◽
Vol 66
(3-4)
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pp. 467-472
◽
Y Yoshino
◽
M Takeuchi
◽
K Inoue
◽
T Makino
◽
S Arai
◽
...
2016 ◽
Vol 37
(7)
◽
pp. 074009
Xixi Han
◽
Yi Ou
◽
Zhigang Li
◽
Wen Ou
◽
Dapeng Chen
◽
...
2010 ◽
Vol 57
(11)
◽
pp. 2537-2549
◽
Tuomas Pensala
◽
Johanna Meltaus
◽
Kimmo Kokkonen
◽
Markku Ylilammi
2002 ◽
Vol 49
(4)
◽
pp. 535-539
◽
M. Ylilammi
◽
J. Ella
◽
M. Partanen
◽
J. Kaitila
T. Nishihara
◽
T. Yokoyama
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T. Miyashita
◽
Y. Satoh
2018 ◽
Vol 19
(10)
◽
pp. 786-795
◽
Jing Liu
◽
Jian-ke Du
◽
Ji Wang
◽
Jia-shi Yang