Electrical characterization of radiofrequency glow discharge used for optical emission spectroscopy

Surface and Interface Analysis ◽

10.1002/sia.1581 ◽

2003 ◽

Vol 35 (7) ◽

pp. 604-610 ◽

Author(s):

Ph. Belenguer ◽

Ph. Guillot ◽

L. Therese

Keyword(s):

Glow Discharge ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Electrical Characterization ◽

Optical Emission ◽

Radiofrequency Glow Discharge

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Spatial characterization of pressure-based plasma regimes in a radiofrequency glow discharge by using optical emission spectroscopy

Journal of Analytical Atomic Spectrometry ◽

10.1039/c0ja00177e ◽

2011 ◽

Vol 26 (4) ◽

pp. 758-765 ◽

Author(s):

Rebeca Valledor ◽

Jorge Pisonero ◽

Thomas Nelis ◽

Nerea Bordel

Keyword(s):

Glow Discharge ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Spatial Characterization ◽

Radiofrequency Glow Discharge

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Time-resolved measurement of emission profiles in pulsed radiofrequency glow discharge optical emission spectroscopy: Investigation of the pre-peak

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/j.sab.2010.05.011 ◽

2010 ◽

Vol 65 (7) ◽

pp. 533-541 ◽

Author(s):

D. Alberts ◽

P. Horvath ◽

Th. Nelis ◽

R. Pereiro ◽

N. Bordel ◽

...

Keyword(s):

Glow Discharge ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Pulsed Radiofrequency ◽

Time Resolved ◽

Radiofrequency Glow Discharge

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Depth elemental characterization of 1D self-aligned TiO2 nanotubes using calibrated radio frequency glow discharge optical emission spectroscopy (GDOES)

Applied Surface Science ◽

10.1016/j.apsusc.2018.02.185 ◽

2018 ◽

Vol 442 ◽

pp. 412-416 ◽

Author(s):

Shiva Mohajernia ◽

Anca Mazare ◽

Imgon Hwang ◽

Sofia Gaiaschi ◽

Patrick Chapon ◽

...

Keyword(s):

Glow Discharge ◽

Radio Frequency ◽

Emission Spectroscopy ◽

Tio2 Nanotubes ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Radio Frequency Glow Discharge ◽

Elemental Characterization

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First experiences on characterization of surface oxide films in powder particles by Glow Discharge Optical Emission Spectroscopy (GD-OES)

Metal Powder Report ◽

10.1016/j.mprp.2016.03.005 ◽

2016 ◽

Vol 71 (4) ◽

pp. 261-264 ◽

Author(s):

I. Heikkilä ◽

C. Eggertson ◽

M. Randelius ◽

S. Caddeo-Johansson ◽

D. Chasoglou

Keyword(s):

Glow Discharge ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Oxide Films ◽

Optical Emission ◽

Surface Oxide ◽

Powder Particles

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Characterization of He/CH4dc glow discharge plasmas by optical emission spectroscopy, mass spectrometry, and actinometry

Journal of Applied Physics ◽

10.1063/1.353308 ◽

1993 ◽

Vol 73 (2) ◽

pp. 948-954 ◽

Author(s):

E. de la Cal ◽

D. Tafalla ◽

F. L. Tabares

Keyword(s):

Mass Spectrometry ◽

Glow Discharge ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Discharge Plasmas

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Comparative study of different modes of calibration and quantification in radiofrequency glow discharge optical emission spectroscopy (rf-GD-OES)

Journal of Analytical Atomic Spectrometry ◽

10.1039/b310600d ◽

2004 ◽

Vol 19 (3) ◽

pp. 333 ◽

Author(s):

Alwyn B. Anfone ◽

R. Kenneth Marcus

Keyword(s):

Glow Discharge ◽

Comparative Study ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Radiofrequency Glow Discharge

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Recent advances in glow discharge optical emission spectroscopy for characterization of layers/film used in the photovoltaic field

2015 IEEE 42nd Photovoltaic Specialist Conference (PVSC) ◽

10.1109/pvsc.2015.7356028 ◽

2015 ◽

Author(s):

Philippe Hunault ◽

Christophe Morin ◽

Patrick Chapon

Keyword(s):

Glow Discharge ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Recent Advances

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Depth-resolved analysis of Ni–P plated aluminium hard disks by radiofrequency glow discharge optical emission spectroscopy (rf-GD-OES)

Journal of Analytical Atomic Spectrometry ◽

10.1039/b309396d ◽

2004 ◽

Vol 19 (3) ◽

pp. 345-353 ◽

Author(s):

Wandee Luesaiwong ◽

R. Kenneth Marcus

Keyword(s):

Glow Discharge ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Radiofrequency Glow Discharge

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Characterization of carbon nitride deposition from CH4∕N2 glow discharge plasma beams using optical emission spectroscopy

Physics of Plasmas ◽

10.1063/1.2953521 ◽

2008 ◽

Vol 15 (7) ◽

pp. 073502 ◽

Author(s):

Wei Hu ◽

Jun-Yi Tang ◽

Jia-da Wu ◽

Jian Sun ◽

Yi-qun Shen ◽

...

Keyword(s):

Glow Discharge ◽

Emission Spectroscopy ◽

Carbon Nitride ◽

Optical Emission Spectroscopy ◽

Discharge Plasma ◽

Optical Emission ◽

Glow Discharge Plasma

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Quantitative Studies of Glow-Discharge Deposition Using Optical Emission Spectroscopy

MRS Proceedings ◽

10.1557/proc-38-85 ◽

1984 ◽

Vol 38 ◽

Author(s):

F. J. Kampas

Keyword(s):

Electrical Properties ◽

Glow Discharge ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Secondary Electrons ◽

Rf Discharges ◽

Quantitative Studies ◽

Glow Discharge Deposition

AbstractIntensities of CH optical emission and electrical properties of methane rf discharges as a function of pressure are presented and discussed. The results are consistent with a model in which the properties of the discharge are dominated by secondary electrons traversing the gap between the electrodes.

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