Recent advances in glow discharge optical emission spectroscopy for characterization of layers/film used in the photovoltaic field

Author(s):  
Philippe Hunault ◽  
Christophe Morin ◽  
Patrick Chapon
1984 ◽  
Vol 38 ◽  
Author(s):  
F. J. Kampas

AbstractIntensities of CH optical emission and electrical properties of methane rf discharges as a function of pressure are presented and discussed. The results are consistent with a model in which the properties of the discharge are dominated by secondary electrons traversing the gap between the electrodes.


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