Characterization of carbon nitride deposition from CH4∕N2 glow discharge plasma beams using optical emission spectroscopy

Physics of Plasmas ◽

10.1063/1.2953521 ◽

2008 ◽

Vol 15 (7) ◽

pp. 073502 ◽

Author(s):

Wei Hu ◽

Jun-Yi Tang ◽

Jia-da Wu ◽

Jian Sun ◽

Yi-qun Shen ◽

...

Keyword(s):

Glow Discharge ◽

Emission Spectroscopy ◽

Carbon Nitride ◽

Optical Emission Spectroscopy ◽

Discharge Plasma ◽

Optical Emission ◽

Glow Discharge Plasma

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Near cathode optical emission spectroscopy in N2–H2 glow discharge plasma

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2007.05.063 ◽

2007 ◽

Vol 202 (2) ◽

pp. 301-309 ◽

Author(s):

K.S. Suraj ◽

P. Bharathi ◽

V. Prahlad ◽

S. Mukherjee

Keyword(s):

Glow Discharge ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Discharge Plasma ◽

Optical Emission ◽

Glow Discharge Plasma

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Optical Emission Spectroscopy of Combined Laser Ablation-Hollow Cathode Glow Discharge Plasma Source

NATO Science for Peace and Security Series B: Physics and Biophysics - Nano-Optics: Principles Enabling Basic Research and Applications ◽

10.1007/978-94-024-0850-8_57 ◽

2017 ◽

pp. 519-520

Author(s):

Stefan Karatodorov ◽

Valentin Mihailov ◽

Margarita Grozeva

Keyword(s):

Laser Ablation ◽

Glow Discharge ◽

Hollow Cathode ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Discharge Plasma ◽

Optical Emission ◽

Plasma Source ◽

Glow Discharge Plasma

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Application of optical emission spectroscopy for the determination of optimal CVD diamond growth parameters in abnormal glow discharge plasma

Vacuum ◽

10.1016/j.vacuum.2013.12.001 ◽

2014 ◽

Vol 103 ◽

pp. 28-32 ◽

Author(s):

S.A. Linnik ◽

A.V. Gaydaychuk

Keyword(s):

Glow Discharge ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Discharge Plasma ◽

Growth Parameters ◽

Optical Emission ◽

Cvd Diamond ◽

Glow Discharge Plasma ◽

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Optical emission spectroscopy of glow discharge plasma from SiH4−CH4 system

Electronics and Communications in Japan (Part II Electronics) ◽

10.1002/ecjb.20285 ◽

2007 ◽

Vol 90 (2) ◽

pp. 9-16 ◽

Author(s):

Mitsuya Motohashi ◽

Kenta Ashibu ◽

Yasutaka Hiruta ◽

Kazuaki Homma

Keyword(s):

Glow Discharge ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Discharge Plasma ◽

Optical Emission ◽

Glow Discharge Plasma

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Optical emission spectroscopy for the determination of electron energy distribution function in a He-Ar glow discharge plasma.

Journal of the Spectroscopical Society of Japan ◽

10.5111/bunkou.38.300 ◽

1989 ◽

Vol 38 (4) ◽

pp. 300-303 ◽

Author(s):

Manabu YAMAMOTO ◽

Takeshi SATO ◽

Yoshitaka TAKUBO

Keyword(s):

Distribution Function ◽

Glow Discharge ◽

Energy Distribution ◽

Electron Energy Distribution Function ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Discharge Plasma ◽

Optical Emission ◽

Glow Discharge Plasma

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Studies on chemical sputtering of silicon and carbon in Ar—H2 glow discharge plasma by optical emission spectroscopy

Thin Solid Films ◽

10.1016/0040-6090(91)90461-6 ◽

1991 ◽

Vol 205 (1) ◽

pp. 6-12 ◽

Author(s):

Kouichi Tsuji ◽

Kichinosuke Hirokawa

Keyword(s):

Glow Discharge ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Discharge Plasma ◽

Optical Emission ◽

Glow Discharge Plasma ◽

Chemical Sputtering

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Depth elemental characterization of 1D self-aligned TiO2 nanotubes using calibrated radio frequency glow discharge optical emission spectroscopy (GDOES)

Applied Surface Science ◽

10.1016/j.apsusc.2018.02.185 ◽

2018 ◽

Vol 442 ◽

pp. 412-416 ◽

Author(s):

Shiva Mohajernia ◽

Anca Mazare ◽

Imgon Hwang ◽

Sofia Gaiaschi ◽

Patrick Chapon ◽

...

Keyword(s):

Glow Discharge ◽

Radio Frequency ◽

Emission Spectroscopy ◽

Tio2 Nanotubes ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Radio Frequency Glow Discharge ◽

Elemental Characterization

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Optical emission diagnostics of glow discharge plasma for the carbon nitride growth process

10.1117/12.402652 ◽

2000 ◽

Author(s):

Wei Yu ◽

Shu-Fang Wang ◽

Xiao-Wei Li ◽

Lianshui Zhang ◽

Guangsheng Fu

Keyword(s):

Glow Discharge ◽

Growth Process ◽

Carbon Nitride ◽

Discharge Plasma ◽

Optical Emission ◽

Glow Discharge Plasma

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First experiences on characterization of surface oxide films in powder particles by Glow Discharge Optical Emission Spectroscopy (GD-OES)

Metal Powder Report ◽

10.1016/j.mprp.2016.03.005 ◽

2016 ◽

Vol 71 (4) ◽

pp. 261-264 ◽

Author(s):

I. Heikkilä ◽

C. Eggertson ◽

M. Randelius ◽

S. Caddeo-Johansson ◽

D. Chasoglou

Keyword(s):

Glow Discharge ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Oxide Films ◽

Optical Emission ◽

Surface Oxide ◽

Powder Particles

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Characterization of He/CH4dc glow discharge plasmas by optical emission spectroscopy, mass spectrometry, and actinometry

Journal of Applied Physics ◽

10.1063/1.353308 ◽

1993 ◽

Vol 73 (2) ◽

pp. 948-954 ◽

Author(s):

E. de la Cal ◽

D. Tafalla ◽

F. L. Tabares

Keyword(s):

Mass Spectrometry ◽

Glow Discharge ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Discharge Plasmas

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