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Multi-scale problems in modeling semiconductor processing equipment
Mathematics in Industrial Problems - The IMA Volumes in Mathematics and its Applications
◽
10.1007/978-1-4757-4129-2_10
◽
1997
◽
pp. 105-115
Author(s):
Avner Friedman
Keyword(s):
Semiconductor Processing
◽
Processing Equipment
◽
Multi Scale
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Festo pneumatic drives reduce contamination from semiconductor processing equipment
Microelectronics International
◽
10.1108/mi.2001.21818bad.005
◽
2001
◽
Vol 18
(2)
◽
Keyword(s):
Semiconductor Processing
◽
Processing Equipment
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Semiconductor Processing Equipment: Technology Forecast
Journal of The Electrochemical Society
◽
10.1149/1.2100892
◽
1987
◽
Vol 134
(9)
◽
pp. 553C-558C
Author(s):
Charles F. Drexel
Keyword(s):
Semiconductor Processing
◽
Processing Equipment
◽
Technology Forecast
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An advanced control system for semiconductor processing equipment
Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena
◽
10.1116/1.583459
◽
1986
◽
Vol 4
(6)
◽
pp. 1364
Author(s):
Ron Parker
Keyword(s):
Control System
◽
Semiconductor Processing
◽
Processing Equipment
◽
Advanced Control
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Self-learning fuzzy modeling of semiconductor processing equipment
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop - ASMC '92 Proceedings
◽
10.1109/asmc.1992.253846
◽
2003
◽
Cited By ~ 8
Author(s):
R.L. Chen
◽
C.J. Spanos
Keyword(s):
Fuzzy Modeling
◽
Semiconductor Processing
◽
Processing Equipment
◽
Self Learning
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ISICL: In situ coherent lidar for particle detection in semiconductor-processing equipment
Applied Optics
◽
10.1364/ao.34.001579
◽
1995
◽
Vol 34
(9)
◽
pp. 1579
◽
Cited By ~ 3
Author(s):
Philip C. D. Hobbs
Keyword(s):
Semiconductor Processing
◽
Particle Detection
◽
Processing Equipment
◽
Coherent Lidar
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System level vibration spectra of a low‐vibration cryopump for semiconductor processing equipment
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
◽
10.1116/1.575899
◽
1989
◽
Vol 7
(3)
◽
pp. 2361-2364
◽
Cited By ~ 1
Author(s):
M. Minta
◽
J. Stolz
Keyword(s):
System Level
◽
Semiconductor Processing
◽
Vibration Spectra
◽
Processing Equipment
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CTCSS (Cluster Tool Controller Software System): The Flexible Control System for the Cluster Structured Semiconductor Processing Equipment
IEEJ Transactions on Industry Applications
◽
10.1541/ieejias.124.160
◽
2004
◽
Vol 124
(2)
◽
pp. 160-167
◽
Cited By ~ 2
Author(s):
Takashi Sato
◽
Eiji Yoshida
◽
Yasunori Kakebayashi
◽
Norihisa Komada
Keyword(s):
Control System
◽
Software System
◽
Semiconductor Processing
◽
Processing Equipment
◽
Flexible Control
◽
Flexible Control System
◽
Cluster Tool
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Application of IEC61131-3 for semiconductor processing equipment
ETFA 2001. 8th International Conference on Emerging Technologies and Factory Automation. Proceedings (Cat. No.01TH8597)
◽
10.1109/etfa.2001.997669
◽
2002
◽
Cited By ~ 1
Author(s):
T. Sato
◽
E. Yoshida
◽
Y. Kakebayashi
◽
J. Asakura
◽
N. Komoda
Keyword(s):
Semiconductor Processing
◽
Processing Equipment
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An Intelligent Monitoring System of Semiconductor Processing Equipment using Multiple Time-Series Pattern Recognition
The KIPS Transactions PartD
◽
10.3745/kipstd.2004.11d.3.709
◽
2004
◽
Vol 11D
(3)
◽
pp. 709-716
Keyword(s):
Time Series
◽
Pattern Recognition
◽
Monitoring System
◽
Multiple Time
◽
Multiple Time Series
◽
Semiconductor Processing
◽
Intelligent Monitoring
◽
Processing Equipment
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Model-based control of semiconductor processing equipment: rapid thermal processing example
Proceedings of IEEE Systems Man and Cybernetics Conference - SMC
◽
10.1109/icsmc.1993.384843
◽
2002
◽
Author(s):
R.S. Gyurcsik
◽
R.K. Cavin
◽
F.Y. Sorrell
Keyword(s):
Thermal Processing
◽
Rapid Thermal Processing
◽
Semiconductor Processing
◽
Model Based Control
◽
Processing Equipment
◽
Model Based
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