Design of a Planar High Precision Motion Stage

2009 ◽  
pp. 371-379 ◽  
Author(s):  
Gyula Hermann ◽  
József K. Tar ◽  
Krzysztof R. Kozłowski
Keyword(s):  
High Precision ◽  
Motion Stage ◽  
Precision Motion

A Large Range Compliant Nano-Manipulator Supporting Electron Beam Lithography

2022 ◽  
pp. 1-48
Author(s):  
Yijie Liu ◽  
Zhen Zhang
Keyword(s):  
Electron Beam ◽  
Natural Frequency ◽  
High Precision ◽  
Electron Beam Lithography ◽  
Optimization Design ◽  
Large Range ◽  
Direct Write ◽  
Motion Stage ◽  
Cross Axis ◽  
Precision Motion

Abstract Electron beam lithography (EBL) is an important lithographic process of scanning a focused electron beam (e-beam) to direct write a custom pattern with nanometric accuracy. Due to the very limited field of the focused election beam, a motion stage is needed to move the sample to the e-beam field for processing large patterns. In order to eliminate the stitching error induced by the existing “step and scan” process, we in this paper propose a large range compliant nano-manipulator so that the manipulator and the election beam can be moved in a simultaneous manner. We also present an optimization design for the geometric parameters of the compliant manipulator under the vacuum environment. Experimental results demonstrate 1 mm × 1 mm travel range with high linearity, ~ 0.5% cross-axis error and 5 nm resolution. Moreover, the high natural frequency (~ 56 Hz) of the manipulator facilitates it to achieve high-precision motion of EBL.

Identification of a precision motion stage based on the Hammerstein-Wiener model

2019 ◽  
Author(s):  
Zhu Zhang ◽  
Delong Zhang ◽  
Haiyang Zheng ◽  
Tao Huang ◽  
Yangqiu Xie
Keyword(s):  
Wiener Model ◽  
Motion Stage ◽  
Precision Motion

Ultra‐Sensitive and Stretchable Ionic Skins for High‐Precision Motion Monitoring

2021 ◽  
pp. 2010199
Author(s):  
Jeong Hui Kim ◽  
Kyung Gook Cho ◽  
Dae Hyun Cho ◽  
Kihyon Hong ◽  
Keun Hyung Lee
Keyword(s):  
High Precision ◽  
Precision Motion

scholarly journals Compensation of Hysteresis in Hybrid Reluctance Actuator for High-Precision Motion

2019 ◽  
Vol 52 (15) ◽  
pp. 477-482 ◽  
Author(s):  
Francesco Cigarini ◽  
Shingo Ito ◽  
Julian Konig ◽  
Andreas Sinn ◽  
Georg Schitter
Keyword(s):  
High Precision ◽  
Precision Motion
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