A Novel Flexure Deflection Device with Damping Function: Towards Laser Reflector of 3D Lithography
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2013 ◽
Vol 4
(1)
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pp. 25-43
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2002 ◽
Vol 16
(17n18)
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pp. 2655-2661
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2000 ◽
Vol 317
(3-5)
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pp. 346-350
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