A Deep Fuzzy Semi-supervised Approach to Clustering and Fault Diagnosis of Partially Labeled Semiconductor Manufacturing Data

Explainable AI and Other Applications of Fuzzy Techniques - Lecture Notes in Networks and Systems ◽

10.1007/978-3-030-82099-2_6 ◽

2021 ◽

pp. 62-73

Author(s):

Joseph Cohen ◽

Jun Ni

Keyword(s):

Fault Diagnosis ◽

Semiconductor Manufacturing ◽

Manufacturing Data

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Deep Learning-Based Domain Adaptation Method for Fault Diagnosis in Semiconductor Manufacturing

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2020.2995548 ◽

2020 ◽

Vol 33 (3) ◽

pp. 445-453 ◽

Author(s):

Moslem Azamfar ◽

Xiang Li ◽

Jay Lee

Keyword(s):

Deep Learning ◽

Fault Diagnosis ◽

Semiconductor Manufacturing ◽

Domain Adaptation ◽

Adaptation Method

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Autoassociative neural networks for fault diagnosis in semiconductor manufacturing

Tasks and Methods in Applied Artificial Intelligence - Lecture Notes in Computer Science ◽

10.1007/3-540-64574-8_444 ◽

1998 ◽

pp. 582-592

Author(s):

Luis J. Barrios ◽

Lissette Lemus

Keyword(s):

Neural Networks ◽

Fault Diagnosis ◽

Semiconductor Manufacturing ◽

Autoassociative Neural Networks

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Run-to-Run sensor variation monitoring for process fault diagnosis in semiconductor manufacturing

2016 Winter Simulation Conference (WSC) ◽

10.1109/wsc.2016.7822291 ◽

2016 ◽

Author(s):

Jakey Blue ◽

Agnes Roussy ◽

Jacques Pinaton

Keyword(s):

Fault Diagnosis ◽

Semiconductor Manufacturing ◽

Process Fault Diagnosis

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2.3.1 Benefits and Costs of Model-Based Fault Diagnosis for Semiconductor Manufacturing Equipment

INCOSE International Symposium ◽

10.1002/j.2334-5837.2007.tb02878.x ◽

2007 ◽

Vol 17 (1) ◽

pp. 324-335 ◽

Author(s):

Jurryt Pietersma ◽

Arjan J.C. van Gemund

Keyword(s):

Fault Diagnosis ◽

Semiconductor Manufacturing ◽

Manufacturing Equipment ◽

Model Based ◽

Benefits And Costs

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CONSTRUCTING SEMICONDUCTOR MANUFACTURING PERFORMANCE INDEXES AND APPLYING DATA MINING FOR MANUFACTURING DATA ANALYSIS

Journal of the Chinese Institute of Industrial Engineers ◽

10.1080/10170660409509412 ◽

2004 ◽

Vol 21 (4) ◽

pp. 313-327 ◽

Author(s):

Chen-Fu Chien ◽

Allen Hsiao ◽

Ivan Wang

Keyword(s):

Data Mining ◽

Data Analysis ◽

Semiconductor Manufacturing ◽

Performance Indexes ◽

Manufacturing Performance ◽

Manufacturing Data

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One Comprehensive Method to Analyze Semiconductor Manufacturing Data by “Piecewise” Regression

2020 China Semiconductor Technology International Conference (CSTIC) ◽

10.1109/cstic49141.2020.9282439 ◽

2020 ◽

Author(s):

Lin Gu ◽

Wei Yu

Keyword(s):

Semiconductor Manufacturing ◽

Piecewise Regression ◽

Comprehensive Method ◽

Manufacturing Data

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Structured database standardization framework for data mining of semiconductor manufacturing data

10.1109/asqed.2009.5206234 ◽

2009 ◽

Author(s):

A. Achath Mohanan ◽

C. Chan ◽

M.P-L. Ooi

Keyword(s):

Data Mining ◽

Semiconductor Manufacturing ◽

Manufacturing Data

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Mining semiconductor manufacturing data for productivity improvement — an integrated relational database approach

Computers in Industry ◽

10.1016/s0166-3615(01)00079-3 ◽

2001 ◽

Vol 45 (1) ◽

pp. 29-44 ◽

Author(s):

Russ M. Dabbas ◽

Hung-Nan Chen

Keyword(s):

Relational Database ◽

Semiconductor Manufacturing ◽

Productivity Improvement ◽

Manufacturing Data

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Data mining and fault diagnosis based on wafer acceptance test data and in-line manufacturing data

2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203) ◽

10.1109/issm.2001.962941 ◽

2002 ◽

Author(s):

Chih-Min Fan ◽

Ruey-Shan Guo ◽

A. Chen ◽

Kuo-Ching Hsu ◽

Chih-Shih Wei

Keyword(s):

Data Mining ◽

Fault Diagnosis ◽

Test Data ◽

Acceptance Test ◽

Manufacturing Data

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Hierarchical clustering methods for semiconductor manufacturing data

IEEE International Conference on Networking, Sensing and Control, 2004 ◽

10.1109/icnsc.2004.1297094 ◽

2004 ◽

Author(s):

Chun-Hai Hu ◽

Shun-Feng Su

Keyword(s):

Hierarchical Clustering ◽

Semiconductor Manufacturing ◽

Clustering Methods ◽

Hierarchical Clustering Methods ◽

Manufacturing Data

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