Run-to-Run sensor variation monitoring for process fault diagnosis in semiconductor manufacturing

2016 Winter Simulation Conference (WSC) ◽

10.1109/wsc.2016.7822291 ◽

2016 ◽

Author(s):

Jakey Blue ◽

Agnes Roussy ◽

Jacques Pinaton

Keyword(s):

Fault Diagnosis ◽

Semiconductor Manufacturing ◽

Process Fault Diagnosis

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Autoencoder embedded dictionary learning for nonlinear industrial process fault diagnosis

Journal of Process Control ◽

10.1016/j.jprocont.2021.02.002 ◽

2021 ◽

Vol 101 ◽

pp. 24-34

Author(s):

Yanxia Li ◽

Yi Chai ◽

Hongpeng Yin

Keyword(s):

Fault Diagnosis ◽

Dictionary Learning ◽

Industrial Process ◽

Process Fault Diagnosis

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A novel one‐dimensional convolutional neural network architecture for chemical process fault diagnosis

The Canadian Journal of Chemical Engineering ◽

10.1002/cjce.24087 ◽

2021 ◽

Author(s):

Xin Niu ◽

Xia Yang

Keyword(s):

Neural Network ◽

Fault Diagnosis ◽

Convolutional Neural Network ◽

Network Architecture ◽

Chemical Process ◽

Neural Network Architecture ◽

One Dimensional ◽

Process Fault Diagnosis

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Application of Artificial Neural Networks in Process Fault Diagnosis

IFAC Proceedings Volumes ◽

10.1016/s1474-6670(17)51177-5 ◽

1991 ◽

Vol 24 (6) ◽

pp. 423-428

Author(s):

T. Sorsa ◽

H.N. Koivo

Keyword(s):

Neural Networks ◽

Artificial Neural Networks ◽

Fault Diagnosis ◽

Artificial Neural ◽

Process Fault Diagnosis

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Development and classification of expert systems for chemical process fault diagnosis

Robotics and Computer-Integrated Manufacturing ◽

10.1016/0736-5845(88)90015-4 ◽

1988 ◽

Vol 4 (3-4) ◽

pp. 437-446 ◽

Author(s):

Mark A. Kramer ◽

F. Eric Finch

Keyword(s):

Fault Diagnosis ◽

Expert Systems ◽

Chemical Process ◽

Process Fault Diagnosis

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On-line process fault diagnosis using neural network techniques

Transactions of the Institute of Measurement and Control ◽

10.1177/014233129201400402 ◽

1992 ◽

Vol 14 (4) ◽

pp. 179-188 ◽

Author(s):

J. Zhang ◽

P.D. Roberts

Keyword(s):

Neural Network ◽

Fault Diagnosis ◽

On Line ◽

Line Process ◽

Process Fault Diagnosis

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Whole process fault diagnosis and prognosis of complex equipments in whole life-circle

Environment, Energy and Sustainable Development ◽

10.1201/b16320-206 ◽

2013 ◽

pp. 1003-1006

Author(s):

Rui Guo ◽

Guo-Qiang Wang ◽

Guang-Yao Lian ◽

Shi-Lei Li

Keyword(s):

Fault Diagnosis ◽

Whole Process ◽

Diagnosis And Prognosis ◽

Process Fault Diagnosis ◽

Fault Diagnosis And Prognosis ◽

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A Deep Fuzzy Semi-supervised Approach to Clustering and Fault Diagnosis of Partially Labeled Semiconductor Manufacturing Data

Explainable AI and Other Applications of Fuzzy Techniques - Lecture Notes in Networks and Systems ◽

10.1007/978-3-030-82099-2_6 ◽

2021 ◽

pp. 62-73

Author(s):

Joseph Cohen ◽

Jun Ni

Keyword(s):

Fault Diagnosis ◽

Semiconductor Manufacturing ◽

Manufacturing Data

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Locally linear back-propagation based contribution for nonlinear process fault diagnosis

IEEE/CAA Journal of Automatica Sinica ◽

10.1109/jas.2020.1003147 ◽

2020 ◽

Vol 7 (3) ◽

pp. 764-775

Author(s):

Jinchuan Qian ◽

Li Jiang ◽

Zhihuan Song

Keyword(s):

Fault Diagnosis ◽

Back Propagation ◽

Nonlinear Process ◽

Process Fault Diagnosis ◽

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Process fault diagnosis with model- and knowledge-based approaches: Advances and opportunities

Control Engineering Practice ◽

10.1016/j.conengprac.2020.104637 ◽

2020 ◽

Vol 105 ◽

pp. 104637

Author(s):

Weijun Li ◽

Hui Li ◽

Sai Gu ◽

Tao Chen

Keyword(s):

Fault Diagnosis ◽

Knowledge Based ◽

Process Fault Diagnosis

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Process Fault Diagnosis for Continuous Dynamic Systems Over Multivariate Time Series

Time Series Analysis - Data, Methods, and Applications ◽

10.5772/intechopen.85456 ◽

2019 ◽

Author(s):

Chris Aldrich

Keyword(s):

Time Series ◽

Fault Diagnosis ◽

Dynamic Systems ◽

Multivariate Time Series ◽

Continuous Dynamic ◽

Process Fault Diagnosis

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