The present status of the development of a high-power KrF laser system, Ashura, is described. The main amplifier has generated 710 J (95 ns) at the pumping density of 1·lMW/cm3 with the wall plug efficiency of 2·0%. Maximum power of 9·0 GW (200 J/22 ns) per beam has been obtained from the beam lines of six-time pulse multiplexing. Power density of 1 × 1014 W/cm2 has been achieved on target with a 10−6 pre-pulse.