AbstractThe Relative Sensitivity Factor (RSF) in Spark Source Mass Spectrometry analysis was found to be dependent on the number and duration of previous sparking periods. This dependency becomes very strong when dealing with volatile elements. By statistical analysis of experimental RSF values it was found that there is a linear correlation between In (RSF) of some trace elements and their boiling temperature. This correlation fails when dealing with volatile elements and carbon. It was found that elements with a large diffusion coefficient have a large RSF.