Kinetics of a Low-Pressure H2 Multipole Discharge Used for GaAs Treatment
1990 ◽
pp. 147-150
2001 ◽
Vol 11
(PR3)
◽
pp. Pr3-189-Pr3-196
Keyword(s):
1995 ◽
Vol 58
(2)
◽
pp. 101-108
◽
1981 ◽
Vol 85
(26)
◽
pp. 4106-4108
◽
1984 ◽
Vol 13
(5)
◽
pp. 815-830
◽
2011 ◽
Vol 20
(4)
◽
pp. 043001
◽
Keyword(s):
Keyword(s):
1933 ◽
Vol 55
(8)
◽
pp. 3227-3233
◽