Plasma-Surface Interactions and Processing of Materials
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Published By Springer Netherlands

9789401073691, 9789400919464

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Modeling of the Plasma Nitriding Process

Plasma-Surface Interactions and Processing of Materials ◽

10.1007/978-94-009-1946-4_8 ◽

1990 ◽

pp. 155-158

Author(s):

J. L. Marchand ◽

H. Michel ◽

D. Ablitzer ◽

M. Gantois ◽

A. Ricard ◽

...

Keyword(s):

Plasma Nitriding ◽

Nitriding Process

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Technological Considerations on Thin Films Process Based on NTa2

Plasma-Surface Interactions and Processing of Materials ◽

10.1007/978-94-009-1946-4_37 ◽

1990 ◽

pp. 519-524

Author(s):

M. Tudanca ◽

F. Lopez

Keyword(s):

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Plasma-Assisted Deposition of Polymers

Plasma-Surface Interactions and Processing of Materials ◽

10.1007/978-94-009-1946-4_30 ◽

1990 ◽

pp. 425-456 ◽

Author(s):

R. d’Agostino

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In Situ Substrate Chemical Analysis during Sputter Deposition

Plasma-Surface Interactions and Processing of Materials ◽

10.1007/978-94-009-1946-4_20 ◽

1990 ◽

pp. 317-318

Author(s):

M. Hecq ◽

P. Legrand

Keyword(s):

Chemical Analysis ◽

Sputter Deposition

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Plasma-Enhanced CVD of Silicon-Related Compounds

Plasma-Surface Interactions and Processing of Materials ◽

10.1007/978-94-009-1946-4_29 ◽

1990 ◽

pp. 401-424

Author(s):

W. A. P. Claassen ◽

G. M. J. Rutten

Keyword(s):

Plasma Enhanced Cvd ◽

Related Compounds

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Basic Physics of Plasmas/Discharges: Production of Active Species

Plasma-Surface Interactions and Processing of Materials ◽

10.1007/978-94-009-1946-4_1 ◽

1990 ◽

pp. 1-34 ◽

Author(s):

A. Ricard

Keyword(s):

Active Species ◽

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Transport Phenomena in Plasma Processing

Plasma-Surface Interactions and Processing of Materials ◽

10.1007/978-94-009-1946-4_5 ◽

1990 ◽

pp. 135-146 ◽

Author(s):

Alberto Gras-Martí ◽

José-Antonio Vallés-Abarca ◽

Juan-Carlos Moreno-Marín

Keyword(s):

Transport Phenomena ◽

Plasma Processing

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Surface Treatment of PP Films by a Non Equilibrium Low Pressure Plasma of NH3, N2,Ar

Plasma-Surface Interactions and Processing of Materials ◽

10.1007/978-94-009-1946-4_34 ◽

1990 ◽

pp. 507-510 ◽

Author(s):

V. Andre ◽

F. Tchoubineh ◽

F. Arefi ◽

J. Amouroux

Keyword(s):

Surface Treatment ◽

Low Pressure ◽

Pressure Plasma ◽

Low Pressure Plasma ◽

Non Equilibrium

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Kinetics of a Low-Pressure H2 Multipole Discharge Used for GaAs Treatment

Plasma-Surface Interactions and Processing of Materials ◽

10.1007/978-94-009-1946-4_6 ◽

1990 ◽

pp. 147-150

Author(s):

J. Bretagne ◽

D. Jacquin ◽

R. Ferdinand

Keyword(s):

Low Pressure ◽

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Effects of a Partial Orientation of Cu++ Complexes in YBa2 Cu3 O7-x Pellets

Plasma-Surface Interactions and Processing of Materials ◽

10.1007/978-94-009-1946-4_44 ◽

1990 ◽

pp. 551-553

Author(s):

A. Bonanno ◽

M. Camarca ◽

R. Bartucci ◽

L. Sportelli ◽

E. Colavita ◽

...

Keyword(s):

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