Condition Monitoring and Operational Decision-Making in Modern Semiconductor Manufacturing Systems

Author(s):  
Dragan Djurdjanovic
2013 ◽  
Vol 26 (4) ◽  
pp. 454-464 ◽  
Author(s):  
Michael E. Cholette ◽  
Merve Celen ◽  
Dragan Djurdjanovic ◽  
John D. Rasberry

2011 ◽  
Vol 5 (3) ◽  
pp. 272 ◽  
Author(s):  
Ching Hua Chen Ritzo ◽  
Sugato Bagchi ◽  
Lindsay E. Burns ◽  
Steven C. Catlett

Author(s):  
Merve Celen ◽  
Dragan Djurdjanovic

In highly flexible and integrated manufacturing systems such as those in semiconductor manufacturing, there exist strong dynamic interactions between the equipment condition, operations executed on the equipment and the resulting product quality. These interactions necessitate a methodology that integrates the decisions of maintenance scheduling and production operations. Currently, maintenance and production operations decision-making are two decoupled processes. In this paper we aim to devise an integrated decision making policy for maintenance scheduling and production sequencing with the objective of maximizing an adaptive profit function, while taking into account operation-dependent degradation models and a production target. In order to obtain the optimal decision policy, a metaheuristic method based on the results of discrete-event simulations of the target manufacturing system is used. The new approach is demonstrated in simulations of a generic cluster tool routinely used in semiconductor manufacturing. The results show that jointly making maintenance and production sequencing decisions consistently outperforms the current practice of making these decisions separately.


Author(s):  
Merve Celen ◽  
Dragan Djurdjanovic

In highly flexible and integrated manufacturing systems, such as semiconductor manufacturing, the strong dynamic interactions between the equipment condition, operations executed on the equipment, and the resulting product quality necessitate a methodology that integrates the decision-making process across the domains of maintenance scheduling and production operations. Currently, maintenance and production operations decision-making are two decoupled processes. In this paper, we devise an integrated decision-making policy for maintenance scheduling and production sequencing, with the objective of optimizing a customizable objective function, while taking into account operation-dependent degradation models and a production target. Optimization was achieved using a metaheuristic method based on the results of discrete-event simulations of the target manufacturing system. The new approach is demonstrated in simulations of a generic cluster tool routinely used in semiconductor manufacturing. The results show that jointly making maintenance and production sequencing decisions consistently and often significantly outperforms the current practice of making these decisions separately.


Author(s):  
D. Verzilin ◽  
T. Maximova ◽  
I. Sokolova

Goal. The purpose of the study was to search for alternative sources of information on popu-lation’s preferences and response to problems and changes in the urban environment for use in the operational decision-making at situational centers. Materials and methods. The authors used data from search queries with keywords, data on communities in social networks, data from subject forums, and official statistics. Methods of statistical data analysis were applied. Results. The analysis of thematic online activity of the population was performed. The re-sults reflected the interest in the state of the environment, the possibility of distance learning and work, are presented. It was reasoned that measurements of population’s thematic online activity let identify needs and analyze the real-time response to changes in the urban envi-ronment. Such an approach to identifying the needs of the population can be used in addition to the platforms “Active Citizen” of the Smart City project. Conclusions. An analysis of data on online activity of the population for decision-making at situational centers is more operational, flexible and representative, as compared with the use of tools of those platforms. Such an analysis can be used as an alternative to sociological surveys, as it saves time and money. When making management decisions using intelligent information services, it is necessary to take into account the needs of the population, reflect-ed in its socio-economic activity in cyberspace.


Author(s):  
Da-Yin Liao

Contemporary 300mm semiconductor manufacturing systems have highly automated and digitalized cyber-physical integration. They suffer from the profound problems of integrating large, centralized legacy systems with small islands of automation. With the recent advances in disruptive technologies, semiconductor manufacturing has faced dramatic pressures to reengineer its automation and computer integrated systems. This paper proposes a Distributed-Ledger, Edge-Computing Architecture (DLECA) for automation and computer integration in semiconductor manufacturing. Based on distributed ledger and edge computing technologies, DLECA establishes a decentralized software framework where manufacturing data are stored in distributed ledgers and processed locally by executing smart contracts at the edge nodes. We adopt an important topic of automation and computer integration for semiconductor research &development (R&D) operations as the study vehicle to illustrate the operational structure and functionality, applications, and feasibility of the proposed DLECA software framework.


Author(s):  
Robert M. Bushman ◽  
Bradley E. Hendricks ◽  
Christopher D. Williams

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