Direct ion beam deposition of polymeric styrene films and in situ characterization by electron spectroscopy

AbstractAnalysis of the phase behavior, structure, and composition of aluminum nitride thin films with up to 22% boron prepared by ion-beam assisted deposition is presented. the c-lattice constant of the film decreased with increasing boron content as expected from the formation of an aIN - wurtzite BN alloy. there was no evidence for separate boron nitride precipitation from either X-ray diffraction or FTIR. IN contrast, auger electron spectroscopy of the boron present in the films suggested that two types of boron bonding was present.

Download Full-text

In SITU And EX SITU Observation Of Spin-valves Obtained By Ion-beam Deposition

1997 IEEE International Magnetics Conference (INTERMAG'97) ◽

10.1109/intmag.1997.597655 ◽

2005 ◽

Author(s):

D. Guarisco ◽

Shan X. Wang

Keyword(s):

Ion Beam ◽

Spin Valves ◽

Ex Situ ◽

Ion Beam Deposition ◽

Beam Deposition

Download Full-text

In situ and ex situ investigation on the annealing performance of the ZnO film grown by ion beam deposition

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-009-9874-7 ◽

2009 ◽

Vol 21 (1) ◽

pp. 88-95 ◽

Cited By ~ 5

Author(s):

Tao Chen ◽

Shu-Yi Liu ◽

Qi Xie ◽

Christophe Detavernier ◽

R. L. Van Meirhaeghe ◽

...

Keyword(s):

Ion Beam ◽

Ex Situ ◽

Zno Film ◽

Ion Beam Deposition ◽

Beam Deposition

Download Full-text

Ion beam deposition and in-situ ion beam analysis

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/0168-583x(92)95179-u ◽

1992 ◽

Vol 63 (1-2) ◽

pp. 109-119 ◽

Cited By ~ 6

Author(s):

A.H. Al-Bayati ◽

K.G. Orrman-Rossiter ◽

D.G. Armour ◽

J.A. Van den Berg ◽

S.E. Donnelly

Keyword(s):

Ion Beam ◽

Ion Beam Analysis ◽

Ion Beam Deposition ◽

Beam Analysis ◽

Beam Deposition

Download Full-text

Electron energy loss spectroscopy of diamond-like carbon thin films

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100130997 ◽

1992 ◽

Vol 50 (2) ◽

pp. 1272-1273

Author(s):

J. Kulik ◽

Y. Lifshitz ◽

G.D. Lempert ◽

S. Rotter ◽

J.W. Rabalais ◽

...

Keyword(s):

Thin Films ◽

Energy Loss ◽

Electron Energy ◽

Ion Beam ◽

Diamond Like Carbon ◽

Ion Beam Deposition ◽

Chemistry Research ◽

Carbon Thin Films ◽

Electron Energy Loss ◽

Beam Deposition

Carbon thin films with diamond-like properties have generated significant interest in condensed matter science in recent years. Their extreme hardness combined with insulating electronic characteristics and high thermal conductivity make them attractive for a variety of uses including abrasion resistant coatings and applications in electronic devices. Understanding the growth and structure of such films is therefore of technological interest as well as a goal of basic physics and chemistry research. Recent investigations have demonstrated the usefulness of energetic ion beam deposition in the preparation of such films. We have begun an electron microscopy investigation into the microstructure and electron energy loss spectra of diamond like carbon thin films prepared by energetic ion beam deposition.The carbon films were deposited using the MEIRA ion beam facility at the Soreq Nuclear Research Center in Yavne, Israel. Mass selected C+ beams in the range 50 to 300 eV were directed onto Si {100} which had been etched with HF prior to deposition.

Download Full-text