Characterization of boron nitride films deposited from BCl3-NH3-H2 mixtures in chemical vapour infiltration conditions

1994 ◽  
Vol 29 (6) ◽  
pp. 1417-1435 ◽  
Author(s):  
V. Cholet ◽  
L. Vandenbulcke ◽  
J. P. Rouan ◽  
P. Baillif ◽  
R. Erre
Keyword(s):  
Boron Nitride ◽  
Chemical Vapour ◽  
Chemical Vapour Infiltration ◽  
Boron Nitride Films

Characterization of ion-beam-synthesized boron nitride films

1987 ◽  
Vol 90 ◽  
pp. 173-176 ◽  
Author(s):  
Amarjit Singh ◽  
Roger A. Lessard ◽  
Emile J. Knystautas
Keyword(s):  
Boron Nitride ◽  
Ion Beam ◽  
Boron Nitride Films

Structural characterization of boron nitride films

1988 ◽  
Vol 64 (6) ◽  
pp. 2990-2994 ◽  
Author(s):  
T. M. Duncan ◽  
R. A. Levy ◽  
P. K. Gallagher ◽  
M. W. Walsh
Keyword(s):  
Boron Nitride ◽  
Structural Characterization ◽  
Boron Nitride Films

Chemical stability of hydrogen-containing boron nitride films obtained by plasma enhanced chemical vapour deposition

1995 ◽  
Vol 260 (2) ◽  
pp. 156-160 ◽  
Author(s):  
Z.L. Akkerman ◽  
M.L. Kosinova ◽  
N.I. Fainer ◽  
Yu.M. Rumjantsev ◽  
N.P. Sysoeva
Keyword(s):  
Boron Nitride ◽  
Chemical Vapour Deposition ◽  
Chemical Stability ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Boron Nitride Films

Growth and characterization of epitaxial cubic boron nitride films on silicon

1991 ◽  
Vol 43 (8) ◽  
pp. 6816-6819 ◽  
Author(s):  
G. L. Doll ◽  
J. A. Sell ◽  
C. A. Taylor ◽  
R. Clarke
Keyword(s):  
Boron Nitride ◽  
Cubic Boron Nitride ◽  
Boron Nitride Films

ChemInform Abstract: Plasma-Assisted Chemical Vapor Deposition and Characterization of Boron Nitride Films.

ChemInform ◽  
2010 ◽  
Vol 25 (41) ◽  
pp. no-no
Author(s):  
S. V. NGUYEN ◽  
T. NGUYEN ◽  
H. TREICHEL ◽  
O. SPINDLER
Keyword(s):  
Chemical Vapor Deposition ◽  
Boron Nitride ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Boron Nitride Films
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