An experimental micromechanics measurement technique for submicrometre domains

1996 ◽  
Vol 31 (7) ◽  
pp. 1803-1808 ◽  
Author(s):  
C. R. Corleto ◽  
W. L. Bradley ◽  
H. F. Brinson

2013 ◽  
Vol 133 (3) ◽  
pp. 138-140 ◽  
Author(s):  
Motoaki YASUI ◽  
Shoken ISHII ◽  
Hironori IWAI








2011 ◽  
Author(s):  
Don C. Bragg ◽  
Lee E. Frelich ◽  
Robert T. Leverett ◽  
Will Blozan ◽  
Dale J. Luthringer


Author(s):  
Mark Kimball

Abstract Silicon’s index of refraction has a strong temperature coefficient. This temperature dependence can be used to aid sample thinning procedures used for backside analysis, by providing a noncontact method of measuring absolute sample thickness. It also can remove slope ambiguity while counting interference fringes (used to determine the direction and magnitude of thickness variations across a sample).





2015 ◽  
Vol 23 (1) ◽  
pp. 45-58
Author(s):  
Nor Azura Mohamed ◽  
◽  
Zainul Ahmad Rajion ◽  


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