An experimental micromechanics measurement technique for submicrometre domains

1996 ◽  
Vol 31 (7) ◽  
pp. 1803-1808 ◽  
Author(s):  
C. R. Corleto ◽  
W. L. Bradley ◽  
H. F. Brinson
Keyword(s):  
Measurement Technique ◽  
Experimental Micromechanics

The Sine Method: An Alternative Height Measurement Technique

2011 ◽  
Author(s):  
Don C. Bragg ◽  
Lee E. Frelich ◽  
Robert T. Leverett ◽  
Will Blozan ◽  
Dale J. Luthringer
Keyword(s):  
Measurement Technique ◽  
Height Measurement

Silicon Fringe Sample Metrology—A Thickness Measurement Technique

2013 ◽  
Author(s):  
Mark Kimball
Keyword(s):  
Temperature Dependence ◽  
Temperature Coefficient ◽  
Measurement Technique ◽  
Thickness Measurement ◽  
Sample Thickness ◽  
Index Of Refraction ◽  
Interference Fringes ◽  
Noncontact Method ◽  
Thickness Variations

Abstract Silicon’s index of refraction has a strong temperature coefficient. This temperature dependence can be used to aid sample thinning procedures used for backside analysis, by providing a noncontact method of measuring absolute sample thickness. It also can remove slope ambiguity while counting interference fringes (used to determine the direction and magnitude of thickness variations across a sample).

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