Formation of polycrystalline SiC film by excimer-laser chemical vapour deposition

1992 ◽  
Vol 11 (8) ◽  
pp. 477-478 ◽  
Author(s):  
T. Noda ◽  
H. Suzuki ◽  
H. Araki ◽  
F. Abe ◽  
M. Okada
Keyword(s):  
Excimer Laser ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Sic Film

Microstructure and growth of SiC film by excimer laser chemical vapour deposition at low temperatures

1993 ◽  
Vol 28 (10) ◽  
pp. 2763-2768 ◽  
Author(s):  
T. Noda ◽  
H. Suzuki ◽  
H. Araki ◽  
F. Abe ◽  
M. Okada
Keyword(s):  
Excimer Laser ◽  
Chemical Vapour Deposition ◽  
Low Temperatures ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Sic Film

Silicon consumption in excimer-laser-assisted chemical vapour deposition of tungsten

1991 ◽  
Vol 8 (3) ◽  
pp. 181-188 ◽  
Author(s):  
A.J.P. van Maaren ◽  
P.M. Zagwijn ◽  
W.C. Sinke
Keyword(s):  
Excimer Laser ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour

Deposition of tantalum oxide films by ArF excimer laser chemical vapour deposition

1993 ◽  
Vol 226 (1) ◽  
pp. 144-148 ◽  
Author(s):  
Yukio Nishimura ◽  
Kyoji Tokunaga ◽  
Masaharu Tsuji
Keyword(s):  
Excimer Laser ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Tantalum Oxide ◽  
Oxide Films ◽  
Chemical Vapour ◽  
Arf Excimer Laser

Silicon oxide films deposited by excimer laser chemical vapour deposition

1990 ◽  
Vol 193-194 ◽  
pp. 619-626 ◽  
Author(s):  
T Szorényi ◽  
P González ◽  
M.D Fernández ◽  
J Pou ◽  
B León ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Silicon Oxide ◽  
Oxide Films ◽  
Chemical Vapour

ArF-excimer laser induced chemical vapour deposition of amorphous hydrogenated SiGeC films

2003 ◽  
Vol 208-209 ◽  
pp. 682-687 ◽  
Author(s):  
E. López ◽  
S. Chiussi ◽  
C. Serra ◽  
J. Serra ◽  
P. González ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Arf Excimer Laser

Silica deposition by excimer-laser-induced chemical vapour deposition in perpendicular configuration

1996 ◽  
Vol 6 (2) ◽  
pp. 83-92 ◽  
Author(s):  
Betty León ◽  
Armin Klumpp ◽  
Pío González ◽  
Eduardo G. Parada ◽  
Dolores Fernández ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Silica Deposition
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