Langmuir probe measurements of axial variation of plasma parameters in 27.1 MHz rf oxygen planar discharges
1988 ◽
Vol 8
(4)
◽
pp. 425-444
◽
Keyword(s):
Keyword(s):
2017 ◽
Vol 35
(6)
◽
pp. 061308
◽
Keyword(s):
2004 ◽
Vol 44
(7-8)
◽
pp. 650-655
◽
2016 ◽
Vol 56
(8)
◽
pp. 1082-1089
◽
1994 ◽
Vol 3
(4)
◽
pp. 539-544
◽
2017 ◽
Vol 48
(1)
◽
pp. 61-66
◽
Keyword(s):