Langmuir probe measurements of axial variation of plasma parameters in 27.1 MHz rf oxygen planar discharges

1988 ◽  
Vol 8 (4) ◽  
pp. 425-444 ◽  
Author(s):  
H. Sabadil ◽  
S. Klagge ◽  
M. Kammeyer
1997 ◽  
Vol 81 (5) ◽  
pp. 2131-2134 ◽  
Author(s):  
J. M. Hendron ◽  
C. M. O. Mahony ◽  
T. Morrow ◽  
W. G. Graham

2004 ◽  
Vol 44 (7-8) ◽  
pp. 650-655 ◽  
Author(s):  
K. Horvath ◽  
J. Lingertat ◽  
M. Laux ◽  
F. Wagner

2016 ◽  
Vol 56 (8) ◽  
pp. 1082-1089 ◽  
Author(s):  
B. Kirov ◽  
S. Asenovski ◽  
D. Bachvarov ◽  
A. Boneva ◽  
V. Grushin ◽  
...  

1994 ◽  
Vol 3 (4) ◽  
pp. 539-544 ◽  
Author(s):  
A Brockhaus ◽  
C Borchardt ◽  
J Engemann

2017 ◽  
Vol 48 (1) ◽  
pp. 61-66 ◽  
Author(s):  
Julio César Sagás ◽  
Rodrigo Sávio Pessoa ◽  
Homero Santiago Maciel

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