A study on the fabrication of an RTD (resistance temperature detector) by using Pt thin film

2001 ◽  
Vol 18 (1) ◽  
pp. 61-66 ◽  
Author(s):  
Jikwang Kim ◽  
Jongsung Kim ◽  
Younghwa Shin ◽  
Youngsoo Yoon
Keyword(s):  
Thin Film ◽  
Resistance Temperature Detector ◽  
Temperature Detector

MEMS-based microthruster with integrated platinum thin film resistance temperature detector (RTD), heater meander and thermal insulation for operation up to 1,000°C

2012 ◽  
Vol 18 (7-8) ◽  
pp. 1077-1087 ◽  
Author(s):  
Natsuki Miyakawa ◽  
Wolfgang Legner ◽  
Thomas Ziemann ◽  
Dimitri Telitschkin ◽  
Hans-Jörg Fecht ◽  
...  
Keyword(s):  
Thin Film ◽  
Thermal Insulation ◽  
Film Resistance ◽  
Resistance Temperature Detector ◽  
Temperature Detector ◽  
Platinum Thin Film

Pt thin-film resistance temperature detector on flexible Hastelloy tapes

Vacuum ◽  
2021 ◽  
Vol 184 ◽  
pp. 109966
Author(s):  
Lei Shao ◽  
Xiaohui Zhao ◽  
Shipeng Gu ◽  
Yaping Ma ◽  
Yang Liu ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Resistance ◽  
Resistance Temperature Detector ◽  
Temperature Detector

Thin-film resistance temperature detector array for the measurement of temperature distribution inside a phantom

Metrologia ◽  
2017 ◽  
Vol 55 (1) ◽  
pp. L5-L11
Author(s):  
Jai Kyoung Sim ◽  
Jaeyub Hyun ◽  
Il Doh ◽  
Bongyoung Ahn ◽  
Yong Tae Kim
Keyword(s):  
Thin Film ◽  
Temperature Distribution ◽  
Detector Array ◽  
Film Resistance ◽  
Resistance Temperature Detector ◽  
Temperature Detector

Fabrication and characterization of ITO thin film resistance temperature detector

Vacuum ◽  
2017 ◽  
Vol 140 ◽  
pp. 121-125 ◽  
Author(s):  
Yanlei Wang ◽  
Congchun Zhang ◽  
Juan Li ◽  
Guifu Ding ◽  
Li Duan
Keyword(s):  
Thin Film ◽  
Film Resistance ◽  
Resistance Temperature Detector ◽  
Temperature Detector ◽  
Fabrication And Characterization

Fabrication and characterization of nickel thin film as resistance temperature detector

Vacuum ◽  
2020 ◽  
Vol 176 ◽  
pp. 109288 ◽  
Author(s):  
Jinting Cui ◽  
Hao Liu ◽  
Xingliang Li ◽  
Shuwen Jiang ◽  
Bin Zhang ◽  
...  
Keyword(s):  
Thin Film ◽  
Resistance Temperature Detector ◽  
Temperature Detector ◽  
Fabrication And Characterization

scholarly journals DESIGN, FABRICATION AND SENSITIVITY ANALYSIS OF THE RESISTANCE TEMPERATURE DETECTOR THIN FILM SENSORS

2013 ◽  
pp. 112-117
Author(s):  
RAKESH KUMAR ◽  
NIRANJAN SAHOO
Keyword(s):  
Thin Film ◽  
Heat Transfer ◽  
Sensitivity Analysis ◽  
Cost Effective ◽  
Fast Response ◽  
Resistance Temperature Detector ◽  
Thin Film Sensors ◽  
Temperature Detector ◽  
Different Types ◽  
Film Heat Transfer

Thin film heat transfer sensors are most cost effective resistance temperature detector (RTD) sensors for dynamic temperature measurements mainly because of very fast response time (milliseconds or less). These sensors are prepared by deposited high conducting very sensitive gauge material (platinum/nickel/silver) on the insulating surface (pyrex/macor/quartz). The purpose of this work is to fabricate different types of thin film sensors by using high conducting platinum and nanomaterials. After fabrication all these sensors are statically calibrated by oil bath type methods and the typical value of sensitivity for each sensor are calculated and then compared the results between them.

Evaluation of thin film p-type single crystal silicon for use as a CMOS Resistance Temperature Detector (RTD)

2018 ◽  
Vol 283 ◽  
pp. 159-168 ◽  
Author(s):  
Zahid Mehmood ◽  
Mohtashim Mansoor ◽  
Ibraheem Haneef ◽  
S. Zeeshan Ali ◽  
Florin Udrea
Keyword(s):  
Thin Film ◽  
Single Crystal ◽  
Single Crystal Silicon ◽  
Crystal Silicon ◽  
Resistance Temperature Detector ◽  
Temperature Detector ◽  
P Type
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