Proton beam writing a platform technology for high quality three-dimensional metal mold fabrication for nanofluidic applications

2011 ◽  
Vol 17 (9) ◽  
pp. 1519-1527 ◽  
Author(s):  
J. A. van Kan ◽  
P. G. Shao ◽  
Y. H. Wang ◽  
P. Malar
Keyword(s):  
Proton Beam ◽  
Three Dimensional ◽  
Metal Mold ◽  
High Quality ◽  
Proton Beam Writing ◽  
Platform Technology ◽  
Mold Fabrication

Proton beam writing: a platform technology for nanowire production

2008 ◽  
Vol 14 (9-11) ◽  
pp. 1343-1348 ◽  
Author(s):  
J. A. van Kan ◽  
F. Zhang ◽  
S. Y. Chiam ◽  
T. Osipowicz ◽  
A. A. Bettiol ◽  
...  
Keyword(s):  
Proton Beam ◽  
Proton Beam Writing ◽  
Platform Technology

Resist evaluation for proton beam writing, Ni mold fabrication and nano-replication

2014 ◽  
Vol 20 (10-11) ◽  
pp. 2079-2088 ◽  
Author(s):  
Y. H. Wang ◽  
P. Malar ◽  
J. A. van Kan
Keyword(s):  
Proton Beam ◽  
Proton Beam Writing ◽  
Mold Fabrication

Fabrication of three-dimensional structures of resist by proton beam writing

2007 ◽  
Vol 25 (6) ◽  
pp. 2171 ◽  
Author(s):  
Yusuke Furuta ◽  
Naoyuki Uchiya ◽  
Hiroyuki Nishikawa ◽  
Junji Haga ◽  
Takahiro Sato ◽  
...  
Keyword(s):  
Proton Beam ◽  
Three Dimensional ◽  
Proton Beam Writing

Three-Dimensional Proton Beam Writing of Optically Active Coherent Vacancy Spins in Silicon Carbide

Nano Letters ◽  
2017 ◽  
Vol 17 (5) ◽  
pp. 2865-2870 ◽  
Author(s):  
H. Kraus ◽  
D. Simin ◽  
C. Kasper ◽  
Y. Suda ◽  
S. Kawabata ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Proton Beam ◽  
Three Dimensional ◽  
Optically Active ◽  
Proton Beam Writing

Three-dimensional nanolithography using proton beam writing

2003 ◽  
Vol 83 (8) ◽  
pp. 1629-1631 ◽  
Author(s):  
J. A. van Kan ◽  
A. A. Bettiol ◽  
F. Watt
Keyword(s):  
Proton Beam ◽  
Three Dimensional ◽  
Proton Beam Writing

Resist evaluation for Ni mold fabrication and proton beam writing

2013 ◽  
Vol 102 ◽  
pp. 40-43 ◽  
Author(s):  
Y.H. Wang ◽  
P. Malar ◽  
J. Zhao ◽  
J.A. van Kan
Keyword(s):  
Proton Beam ◽  
Proton Beam Writing ◽  
Mold Fabrication

Proton Beam Writing of Three-Dimensional Nanostructures in Hydrogen Silsesquioxane

Nano Letters ◽  
2006 ◽  
Vol 6 (3) ◽  
pp. 579-582 ◽  
Author(s):  
Jeroen A. van Kan ◽  
Andrew A. Bettiol ◽  
Frank Watt
Keyword(s):  
Proton Beam ◽  
Three Dimensional ◽  
Hydrogen Silsesquioxane ◽  
Proton Beam Writing
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