Resist evaluation for proton beam writing, Ni mold fabrication and nano-replication

2014 ◽  
Vol 20 (10-11) ◽  
pp. 2079-2088 ◽  
Author(s):  
Y. H. Wang ◽  
P. Malar ◽  
J. A. van Kan
Keyword(s):  
Proton Beam ◽  
Proton Beam Writing ◽  
Mold Fabrication

Resist evaluation for Ni mold fabrication and proton beam writing

2013 ◽  
Vol 102 ◽  
pp. 40-43 ◽  
Author(s):  
Y.H. Wang ◽  
P. Malar ◽  
J. Zhao ◽  
J.A. van Kan
Keyword(s):  
Proton Beam ◽  
Proton Beam Writing ◽  
Mold Fabrication

Development of ion sources: Towards high brightness for proton beam writing applications

2015 ◽  
Vol 348 ◽  
pp. 23-28 ◽  
Author(s):  
Nannan Liu ◽  
P. Santhana Raman ◽  
Xinxin Xu ◽  
Huei Ming Tan ◽  
Anjam Khursheed ◽  
...  
Keyword(s):  
Proton Beam ◽  
Ion Sources ◽  
High Brightness ◽  
Proton Beam Writing

Fabrication of micro-optical components in polymer using proton beam writing

2004 ◽  
Author(s):  
Andrew A. Bettiol ◽  
Kambiz Ansari ◽  
Tze Chien Sum ◽  
Jeroen A. van Kan ◽  
Frank Watt
Keyword(s):  
Proton Beam ◽  
Optical Components ◽  
Proton Beam Writing

The second generation Singapore high resolution proton beam writing facility

2012 ◽  
Vol 83 (2) ◽  
pp. 02B902 ◽  
Author(s):  
J. A. van Kan ◽  
P. Malar ◽  
Armin Baysic de Vera
Keyword(s):  
High Resolution ◽  
Proton Beam ◽  
Second Generation ◽  
Proton Beam Writing
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