Three-Dimensional Proton Beam Writing of Optically Active Coherent Vacancy Spins in Silicon Carbide

Nano Letters ◽  
2017 ◽  
Vol 17 (5) ◽  
pp. 2865-2870 ◽  
Author(s):  
H. Kraus ◽  
D. Simin ◽  
C. Kasper ◽  
Y. Suda ◽  
S. Kawabata ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Proton Beam ◽  
Three Dimensional ◽  
Optically Active ◽  
Proton Beam Writing

Creation of silicon vacancy in silicon carbide by proton beam writing toward quantum sensing applications

2018 ◽  
Vol 51 (33) ◽  
pp. 333002 ◽  
Author(s):  
Takeshi Ohshima ◽  
Takahiro Satoh ◽  
Hannes Kraus ◽  
Georgy V Astakhov ◽  
Vladimir Dyakonov ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Proton Beam ◽  
Silicon Vacancy ◽  
Sensing Applications ◽  
Proton Beam Writing ◽  
Quantum Sensing

Fabrication of three-dimensional structures of resist by proton beam writing

2007 ◽  
Vol 25 (6) ◽  
pp. 2171 ◽  
Author(s):  
Yusuke Furuta ◽  
Naoyuki Uchiya ◽  
Hiroyuki Nishikawa ◽  
Junji Haga ◽  
Takahiro Sato ◽  
...  
Keyword(s):  
Proton Beam ◽  
Three Dimensional ◽  
Proton Beam Writing

Three-dimensional nanolithography using proton beam writing

2003 ◽  
Vol 83 (8) ◽  
pp. 1629-1631 ◽  
Author(s):  
J. A. van Kan ◽  
A. A. Bettiol ◽  
F. Watt
Keyword(s):  
Proton Beam ◽  
Three Dimensional ◽  
Proton Beam Writing

Proton Beam Writing of Three-Dimensional Nanostructures in Hydrogen Silsesquioxane

Nano Letters ◽  
2006 ◽  
Vol 6 (3) ◽  
pp. 579-582 ◽  
Author(s):  
Jeroen A. van Kan ◽  
Andrew A. Bettiol ◽  
Frank Watt
Keyword(s):  
Proton Beam ◽  
Three Dimensional ◽  
Hydrogen Silsesquioxane ◽  
Proton Beam Writing
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