The monolithic integration system of bulk-Si sensors and actuators based on the Au–Au bonding technology

Chunhua Cai; Ming Qin

doi:10.1007/s00542-012-1583-0

The monolithic integration system of bulk-Si sensors and actuators based on the Au–Au bonding technology

Microsystem Technologies ◽

10.1007/s00542-012-1583-0 ◽

2012 ◽

Vol 19 (2) ◽

pp. 195-201

Author(s):

Chunhua Cai ◽

Ming Qin

Keyword(s):

Monolithic Integration ◽

Sensors And Actuators ◽

Integration System ◽

Bonding Technology

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Material and processing issues for the monolithic integration of microelectronics with surface-micromachined polysilicon sensors and actuators

10.1117/12.221301 ◽

1995 ◽

Cited By ~ 8

Author(s):

James H. Smith ◽

Stephen Montague ◽

Jeffry J. Sniegowski

Keyword(s):

Monolithic Integration ◽

Sensors And Actuators

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Investigation of ferroelectrics using conventional and in situ electron microscopy

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100170669 ◽

1994 ◽

Vol 52 ◽

pp. 586-587

Author(s):

V. Saikumar ◽

H. M. Chan ◽

M. P. Harmer

Keyword(s):

Nonvolatile Memory ◽

Ferroelectric Materials ◽

Gate Insulator ◽

Sensors And Actuators ◽

In Situ Electron Microscopy ◽

Ferroelectric Domains ◽

Domain Boundaries ◽

Domain Interactions ◽

Memory Applications

In recent years, there has been a growing interest in the application of ferroelectric thin films for nonvolatile memory applications and as a gate insulator in DRAM structures. In addition, bulk ferroelectric materials are also widely used as components in electronic circuits and find numerous applications in sensors and actuators. To a large extent, the performance of ferroelectric materials are governed by the ferroelectric domains (with dimensions in the micron to sub-micron range) and the switching of domains in the presence of an applied field. Conventional TEM studies of ferroelectric domains structures, in conjunction with in-situ studies of the domain interactions can aid in explaining the behavior of ferroelectric materials, while providing some answers to the mechanisms and processes that influence the performance of ferroelectric materials. A few examples from bulk and thin film ferroelectric materials studied using the TEM are discussed below.Figure 1 shows micrographs of ferroelectric domains obtained from undoped and Fe-doped BaTiO3 single crystals. The domain boundaries have been identified as 90° domains with the boundaries parallel to <011>.

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