Design principle of micromechanical probe with an electrostatic actuator for friction force microscopy

2013 ◽  
Vol 19 (9-10) ◽  
pp. 1567-1572
Author(s):  
Kenji Fukuzawa ◽  
Hiroaki Tsuji ◽  
Satoshi Hamaoka ◽  
Mitsuhiro Shikida ◽  
Shintaro Itoh ◽  
...  
Keyword(s):  
Friction Force ◽  
Design Principle ◽  
Electrostatic Actuator ◽  
Friction Force Microscopy ◽  
Force Microscopy

MEMS-Based Micro Probe Incorporating Electrostatic Actuator Towards Friction Force Microscopy With Accurate Gap Control

2018 ◽  
Author(s):  
Kenji Fukuzawa ◽  
Mikito Takahashi ◽  
Yusuke Hori ◽  
Shintaro Itoh ◽  
Hedong Zhang
Keyword(s):  
Friction Force ◽  
Force Measurement ◽  
Electrostatic Force ◽  
Sample Surface ◽  
Gap Size ◽  
Electrostatic Actuator ◽  
Friction Force Microscopy ◽  
Force Microscopy ◽  
Gap Control ◽  
Lubrication Properties

Lubrication in nanometer-sliding gaps has attracted much interest along with the advance of processing technology. To clarify the lubrication phenomena in nanometer gaps, force measurement under accurate control of the gap between the sliding probe and sample surface is needed because the lubrication properties significantly depend on the gap size. In this paper, we aimed at realizing friction force microscopes that is capable of accurate control of sliding gap. A probe with an actuator that utilizes electrostatic force was proposed and its feasibility was demonstrated.

D-1-1 Development of a dual-axis friction-force-microscopy probe with an electrostatic actuator

2011 ◽  
Vol 2011 (0) ◽  
pp. 12-13
Author(s):  
Hiroaki Tsuji ◽  
Hiroaki Amakawa ◽  
Kenji Fukuzawa ◽  
Mitsuhiro Shikida ◽  
Shintaro Itoh ◽  
...  
Keyword(s):  
Friction Force ◽  
Electrostatic Actuator ◽  
Friction Force Microscopy ◽  
Force Microscopy

Design principle of micro-mechanical probe for lateral-deflection-controlled friction force microscopy

2016 ◽  
Vol 22 (6) ◽  
pp. 1181-1188
Author(s):  
Kenji Fukuzawa ◽  
Satoshi Hamaoka ◽  
Mitsuhiro Shikida ◽  
Shintaro Itoh ◽  
Hedong Zhang
Keyword(s):  
Friction Force ◽  
Design Principle ◽  
Friction Force Microscopy ◽  
Lateral Deflection ◽  
Force Microscopy ◽  
Mechanical Probe

scholarly journals J111024 Measurement of local rheological properties by using a dual-axis friction-force-microscopy probe with an electrostatic actuator

2011 ◽  
Vol 2011 (0) ◽  
pp. _J111024-1-_J111024-2
Author(s):  
Hiroaki TSUJI ◽  
Hiroaki AMAKAWA ◽  
Kenji FUKUZAWA ◽  
Mitsuhiro SHIKIDA ◽  
Shintaro ITOH ◽  
...  
Keyword(s):  
Rheological Properties ◽  
Friction Force ◽  
Electrostatic Actuator ◽  
Friction Force Microscopy ◽  
Force Microscopy

Initial stages of CaF2/Si(111) epitaxy investigated by friction force microscopy

2003 ◽  
Vol 532-535 ◽  
pp. 633-638 ◽  
Author(s):  
B.H. Müller ◽  
C.R. Wang ◽  
K.R. Hofmann ◽  
M. Bierkandt ◽  
C. Deiter ◽  
...  
Keyword(s):  
Friction Force ◽  
Friction Force Microscopy ◽  
Force Microscopy

Investigation on microtribological behavior of thin films using friction force microscopy

2000 ◽  
Vol 128-129 ◽  
pp. 341-345 ◽  
Author(s):  
Xin-Chun Lu ◽  
Bing Shi ◽  
Lawrence K.Y Li ◽  
Jianbin Luo ◽  
Jihui Wang ◽  
...  
Keyword(s):  
Thin Films ◽  
Friction Force ◽  
Friction Force Microscopy ◽  
Force Microscopy
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