MEMS-Based Micro Probe Incorporating Electrostatic Actuator Towards Friction Force Microscopy With Accurate Gap Control

Lubrication in nanometer-sliding gaps has attracted much interest along with the advance of processing technology. To clarify the lubrication phenomena in nanometer gaps, force measurement under accurate control of the gap between the sliding probe and sample surface is needed because the lubrication properties significantly depend on the gap size. In this paper, we aimed at realizing friction force microscopes that is capable of accurate control of sliding gap. A probe with an actuator that utilizes electrostatic force was proposed and its feasibility was demonstrated.