Size effect on the dynamic analysis of electrostatically actuated micro-actuators

2015 ◽  
Vol 23 (5) ◽  
pp. 1247-1254 ◽  
Author(s):  
J. S. Peng ◽  
L. Yang ◽  
J. Yang
Keyword(s):  
Size Effect ◽  
Dynamic Analysis ◽  
Electrostatically Actuated ◽  
Micro Actuators

Static Analysis of Electrically Actuated Nano to Micron Scale Beams Using Nonlocal Theory

2011 ◽  
Author(s):  
Y. Alizadeh Vaghasloo ◽  
Abdolreza Pasharavesh ◽  
M. T. Ahmadian ◽  
Ali Fallah
Keyword(s):  
Size Effect ◽  
Algebraic Equation ◽  
Bending Moment ◽  
Nonlocal Theory ◽  
Nonlinear Ordinary Differential Equation ◽  
Beam Deflection ◽  
Electrostatically Actuated ◽  
Size Dependent ◽  
Electrically Actuated ◽  
The One

In this paper, size dependent static behavior of micro and nano cantilevers actuated by a static electric field including deflection and pull-in instability, is analyzed implementing nonlocal theory. Euler-bernoulli assumptions are made to model the relation between deflection of the beam and bending moment. Differential form of the constitutive equation of nonlocal theory is used to find the revised equation for bending moment and substituting in the equilibrium equation of electrostatically actuated beams final nonlinear ordinary differential equation is arrived. Also the boundary conditions for solving the equation are revised and to analyze the size effect better governing equation is nondimetionalized. The one parameter Galerkin method is used to transform this equation to a nonlinear algebraic equation. Arrived algebraic equation is solved utilizing Newton-Raphson method. Size effect on the maximum deflection and deflection shape for various applied voltages is studied. Also effect of beam size on the static pull-in voltage is studied. Results indicate that the dimensionless beam deflection decreases as size decreases while the pull-in voltage increases and specially change of deflection and pull-in voltage is significant for nanobeams.

Equivalent area nonlinear static and dynamic analysis of electrostatically actuated microstructures

2012 ◽  
Vol 19 (1) ◽  
pp. 61-70 ◽  
Author(s):  
Rakesh Kalyanaraman ◽  
Gino Rinaldi ◽  
Muthukumaran Packirisamy ◽  
Rama Bhat
Keyword(s):  
Dynamic Analysis ◽  
Static And Dynamic Analysis ◽  
Electrostatically Actuated ◽  
Equivalent Area ◽  
Nonlinear Static

Size Effect on Pull-In Behaviors of Electrostatically Actuated Cantilever Micro-Beams

2013 ◽  
Vol 300-301 ◽  
pp. 889-892
Author(s):  
Sheng Li Kong
Keyword(s):  
Size Effect ◽  
Couple Stress Theory ◽  
Ritz Method ◽  
Modified Couple Stress Theory ◽  
Stress Theory ◽  
Electrostatically Actuated ◽  
Size Dependent ◽  
Deformation Problem ◽  
Approximate Analytical Solutions ◽  
Modified Couple Stress

For the deformation problem of an electrostatically actuated cantilever micro-beam, size effect on pull-in behaviors of the micro-beams have been studied based on modified couple stress theory. The approximate analytical solutions to the pull-in voltage and pull-in displacement of the micro-beam are derived by using the Rayleigh-Ritz method. The results show that the normalized pull-in voltage of the cantilever micro-beam is size-dependent and the normalized pull-in displacement of the micro-beam is size independence.

Fabrication and dynamic analysis of the electrostatically actuated MEMS variable capacitor

2008 ◽  
Vol 14 (3) ◽  
pp. 397-402 ◽  
Author(s):  
Dong-Ming Fang ◽  
Xiang-Meng Jing ◽  
Pei-Hong Wang ◽  
Yong Zhou ◽  
Xiao-Lin Zhao
Keyword(s):  
Dynamic Analysis ◽  
Variable Capacitor ◽  
Electrostatically Actuated

Studies on Surface Tension Influenced Critical Gap in Cantilever Microstructures

2015 ◽  
Vol 32 (1) ◽  
pp. 19-24
Author(s):  
L.-J. Yang ◽  
S. Marimuthu
Keyword(s):  
Surface Tension ◽  
Dynamic Analysis ◽  
Power Law ◽  
Capillary Force ◽  
Surface Force ◽  
Drying Process ◽  
Critical Gap ◽  
Critical Wetting ◽  
Micro Actuators ◽  
Micro Cantilever

ABSTRACTThis note presents an elasto-capillary model of a cantilever subject to capillary stiction during drying process of removing sacrificial layers in MEMS. Similar to the dynamic analysis of the electrostatic pull-in of electrostatic micro actuators, the cantilever beam tends to be pulled down to the substrate due to the nonlinear capillary force with respect to the gap. The critical one-half gap deformation and the corresponding critical wetting area for pulling down a micro cantilever by surface tension are analytically found herein. The instability situation of a generalized critical deformation for power-law surface force with respect to gap is also predicted accordingly. Some prior MEMS works are exemplified to justify this critical one-half gap deformation for capillary stiction.

Scale Effect on Dynamic Analysis of Electrostatically Actuated Nano Beams Using the Nonlocal-Gradient Elasticity Theory

2013 ◽  
Vol 411-414 ◽  
pp. 1859-1862
Author(s):  
Liu Yang ◽  
Jian She Peng
Keyword(s):  
Dynamic Analysis ◽  
Elasticity Theory ◽  
Scale Effect ◽  
Gradient Elasticity ◽  
Nonlocal Elasticity Theory ◽  
Strain Gradient Theory ◽  
Small Scale ◽  
Gradient Theory ◽  
Beam Model ◽  
Electrostatically Actuated

A nonlocal-gradient elasticity beam model with two independent gradient coefficients based on the classical nonlocal elasticity theory and strain gradient theory is used to study dynamic analysis of electrostatically actuated nanobeams. The numerical results show that the deflection response and frequency response of nanobeams are all affected by the small scale. And the two independent gradient coefficients play the different roles in it. This paper broadens the way of studying scale effect.

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