Comment on the paper "Microsystem Technologies (2018) 24:4965–4979”

Asterios Pantokratoras

doi:10.1007/s00542-020-04816-7

Microsystem Technologies widens its scope

Microsystem Technologies ◽

10.1007/s00542-002-0204-8 ◽

2002 ◽

Vol 8 (1) ◽

pp. 1-2

Keyword(s):

Microsystem Technologies

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Comment on the paper “Microsystem Technologies: (2018) 24:2919–2928”

Microsystem Technologies ◽

10.1007/s00542-018-4197-3 ◽

2018 ◽

Vol 25 (4) ◽

pp. 1151-1153 ◽

Cited By ~ 1

Author(s):

Asterios Pantokratoras

Keyword(s):

Microsystem Technologies

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The effect of residual solvent on the profiles of thick positive DNO-photoresist for Microsystem Technologies

Microsystem Technologies ◽

10.1007/bf02447750 ◽

1996 ◽

Vol 2 (2) ◽

pp. 50-55 ◽

Cited By ~ 3

Author(s):

J. Schulz ◽

T. Mono ◽

S. J. Chung ◽

J. Mohr

Keyword(s):

Residual Solvent ◽

Microsystem Technologies

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Future Applications of Microsystem Technologies in Automotive Safety Systems

Advanced Microsystems for Automotive Applications 98 ◽

10.1007/978-3-642-72146-5_3 ◽

1998 ◽

pp. 21-42 ◽

Cited By ~ 5

Author(s):

Peter Steiner ◽

Stefan M. Schwehr

Keyword(s):

Automotive Safety ◽

Safety Systems ◽

Microsystem Technologies

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3D FOCALIZATION MICROFLUIDIC DEVICE BUILT WITH LTCC TECHNOLOGY FOR NANOPARTICLE GENERATION USING NANOPRECIPITATION ROUTE

Additional Conferences (Device Packaging HiTEC HiTEN & CICMT) ◽

10.4071/cicmt-tha13 ◽

2015 ◽

Vol 2015 (CICMT) ◽

pp. 000275-000280 ◽

Cited By ~ 2

Author(s):

Houari Cobas Gomez ◽

Mario Ricardo Gongora-Rubio ◽

Bianca Oliveira Agio ◽

Vanessa Tiemi Kimura ◽

Adriano Marim de Oliveira ◽

...

Keyword(s):

Microfluidic Device ◽

Chemical Process ◽

Chemical Processes ◽

Polydispersity Index ◽

Flow Focusing ◽

Enabling Technology ◽

Fine Chemistry ◽

Excellent Control ◽

Microsystem Technologies ◽

Nanoparticle Generation

Nanoprecipitation is a nanonization technique used for nanoparticle generation. Several fields, like pharmacology and fine chemistry, make use of such technique. Typically are used a bulky batch mechanical processes rendering high polydispersity index of generated nanoparticles, poorly particle size reproducibility and energy wasting. LTCC-based microsystem technologies allow the implementation of different unitary operations for chemical process, making it an enabling technology for the miniaturization of chemical processes. In fact, recently LTCC microfluidic reactors have been used to produce micro and nanoparticles with excellent control of size distribution and morphology. The present work provides a report on the performance of a 3D LTCC flow focusing Microfluidic device designed to fabricate polymeric nanocapsules for Hydrocortisone drug encapsulation, using nanoprecipitation route. Monodisperse Hydrocortisone nanocapsules were obtained with sizes (Tp) from 188.9 nm to 459.1 nm with polydispersity index (PDI) from 0.102 to 0.235.

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LTCC Microsystems and Microsystem Packaging and Integration Applications

Journal of Microelectronics and Electronic Packaging ◽

10.4071/1551-4897-3.3.109 ◽

2006 ◽

Vol 3 (3) ◽

pp. 109-120

Author(s):

K.A. Peterson ◽

K.D. Patel ◽

C.K. Ho ◽

B.R. Rohrer ◽

C.D. Nordquist ◽

...

Keyword(s):

Chemical Properties ◽

Control Analysis ◽

Multichip Modules ◽

Widespread Application ◽

Transparent Windows ◽

Electrical Connections ◽

Physical And Chemical ◽

Microsystem Packaging ◽

Microsystem Technologies ◽

Moving Parts

Low Temperature Cofired Ceramic (LTCC) has proven to be an enabling medium for microsystem technologies, because of its desirable electrical, physical, and chemical properties coupled with its capability for rapid prototyping and scalable manufacturing of components. LTCC is viewed as an extension of hybrid microcircuits, and in that function it enables development, testing, and deployment of silicon microsystems. However, its versatility has allowed it to succeed as a microsystem medium in its own right, with applications in non-microelectronic meso-scale devices and in a range of sensor devices. Applications include silicon microfluidic ‘chip-and-wire’ systems and fluid grid array (FGA)/microfluidic multichip modules using embedded channels in LTCC, and cofired electro-mechanical systems with moving parts. Both the microfluidic and mechanical system applications are enabled by sacrificial volume materials (SVM), which serve to create and maintain cavities and separation gaps during the lamination and cofiring process. SVMs consisting of thermally fugitive or partially inert materials are easily incorporated. Screeding is an incorporation technique we describe that improves uniformity and eliminates processing steps. Recognizing the premium on devices that are cofired rather than assembled, we report on functional-as-released and functional-as-fired moving parts, including an impeller that has been exercised over thirty million cycles, and a cofired pressure sensor that requires only pressure source and electrical connections. Additional applications for cofired transparent windows, some as small as an optical fiber, are also described. The applications described help pave the way for widespread application of LTCC to biomedical, control, analysis, characterization, and radio frequency (RF) functions for macro-meso-microsystems.

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