A fan-shaped laser beam scanning measuring system based on the triangulation principle,
was newly developed in this study to measure simultaneously the flatness and the surface roughness
of a surface plate with good reflectivity after a suitable calibration. The developed system mainly
consists of a micro-focus fan-shaped line laser, an image processing system, a PC-based 3-axis
machine, and a PC. The height value of the object can be calculated, based on the offset between the
position projected onto the object and the position projected onto the platform, after carrying out the
height calibration with gauge blocks. According to the scattering theorem, a correlation between the
surface roughness of the test object measured with a precision stylus instrument and the average
fringe width projected onto the test object surface, has been constructed.
High-Q MEMS Resonators for Laser Beam Scanning Displays
