Thermal stability of Al/nanocrystalline-Si bilayers investigated by in situ heating energy-filtered transmission electron microscopy

2011 ◽  
Vol 46 (12) ◽  
pp. 4314-4317 ◽  
Author(s):  
Z. M. Wang ◽  
L. Gu ◽  
L. P. H. Jeurgens ◽  
E. J. Mittemeijer
Microscopy ◽  
2018 ◽  
Vol 67 (2) ◽  
pp. 112-120
Author(s):  
Hiroyasu Saka ◽  
Hiroyuki Iwata ◽  
Daisuke Kawaguchi

Abstract Radiation of a permeable laser beam into Si induces considerable modification of structures. Thermal stability of the laser-induced modified volumes (LIMV’s) was studied comprehensively by means of in situ and ex situ heating experiments using transmission electron microscopy. The behavior in the tail region of a LIMV can be understood by dislocation theory, while that of a void formed at the very focus of a laser beam cannot be understood easily.


APL Materials ◽  
2019 ◽  
Vol 7 (7) ◽  
pp. 071110 ◽  
Author(s):  
Chao Zhang ◽  
Joseph F. S. Fernando ◽  
Konstantin L. Firestein ◽  
Joel E. von Treifeldt ◽  
Dumindu Siriwardena ◽  
...  

2005 ◽  
Vol 20 (7) ◽  
pp. 1741-1750
Author(s):  
L.C. Nistor ◽  
O. Richard ◽  
C. Zhao ◽  
H. Bender ◽  
G. Van Tendeloo

The thermal stability of amorphous Zr:Al mixed oxide films of different composition, produced on (001) silicon wafers by the atomic layer deposition method is studied by transmission electron microscopy during in situ heating experiments. The temperatures at which phase separation and crystallization occur are composition dependent. The crystallization of thick films (55–70 nm), deposited on HF-treated silicon surfaces covered with a 15 cycles Al2O3 layer, results in the formation of cubic ZrO2 and cubic γ–Al2O3. In very thin films (5 nm), deposited on silicon surfaces covered with a 0.5 nm SiO2 thin film, the formation of tetragonal zirconium disilicide (ZrSi2) is observed in the microscope vacuum, at temperatures above 900 °C. This effect depends on the thickness of the as deposited thin film.


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