Structural and optical properties of oxygen to argon flow ratio on the Zn0.98Cr0.02O thin films deposited by RF magnetron sputtering

2015 ◽  
Vol 27 (1) ◽  
pp. 316-321
Author(s):  
Chang-Feng Fu ◽  
Lian-Fu Han ◽  
Jing-Wei Lv ◽  
Fa-Mei Wang ◽  
Tao Sun ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Flow Ratio ◽  
Structural And Optical Properties ◽  
Argon Flow

Structural and optical properties of Nb-doped β-Ga2O3 thin films deposited by RF magnetron sputtering

Vacuum ◽  
2017 ◽  
Vol 146 ◽  
pp. 93-96 ◽  
Author(s):  
Hao Zhang ◽  
Jinxiang Deng ◽  
Zhiwei Pan ◽  
Zhiying Bai ◽  
Le Kong ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Structural And Optical Properties
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