Significance of memory-dependent derivative approach for the analysis of thermoelastic damping in micromechanical resonators

2020 ◽  
Author(s):  
Ravi Kumar ◽  
Rakhi Tiwari ◽  
Roushan Kumar
Keyword(s):  
Thermoelastic Damping ◽  
Micromechanical Resonators

Thermoelastic damping in GaAs micromechanical resonators

2008 ◽  
Vol 5 (9) ◽  
pp. 2920-2922 ◽  
Author(s):  
Hajime Okamoto ◽  
Daisuke Ito ◽  
Koji Onomitsu ◽  
Hiroshi Yamaguchi
Keyword(s):  
Thermoelastic Damping ◽  
Micromechanical Resonators

Thermoelastic damping in micromechanical resonators

2009 ◽  
Vol 95 (6) ◽  
pp. 061903 ◽  
Author(s):  
Thomas H. Metcalf ◽  
Bradford B. Pate ◽  
Douglas M. Photiadis ◽  
Brian H. Houston
Keyword(s):  
Thermoelastic Damping ◽  
Micromechanical Resonators

A Numerical Model for Thermoelastic Damping in Micromechanical Resonators Made From Anisotropic Materials

2008 ◽  
Author(s):  
Yang Xu ◽  
Zhili Hao
Keyword(s):  
Numerical Model ◽  
Thermal Energy ◽  
Single Crystal Silicon ◽  
Mathematical Expression ◽  
Transient Heat Conduction ◽  
Anisotropic Materials ◽  
Thermoelastic Damping ◽  
Crystal Silicon ◽  
Micromechanical Resonators ◽  
Complex Structural

This paper presents a numerical model for thermoelastic damping (TED) in micromechanical resonators made from anisotropic materials, such as single crystal silicon. It is built upon a thermal-energy method, in which TED is interpreted as the generation of thermal energy per cycle of vibration and consequently the mathematical expression for TED is derived from the linear thermoelastic governing equations for anisotropic media. This numerical model consists of two sequential numerical simulations: elastic vibrations and transient heat conduction, and is developed in the ANSYS/Multiphysics, giving rise to the numerical value for the derived expression for TED and further the quality factor related to TED (QTED) in a micromechanical resonator with any complex structural geometry. Through comparison with experimental data in the literature, the validity of the presented numerical model is demonstrated.

Microcrystalline diamond micromechanical resonators with quality factor limited by thermoelastic damping

2013 ◽  
Vol 102 (7) ◽  
pp. 071901 ◽  
Author(s):  
Hadi Najar ◽  
Amir Heidari ◽  
Mei-Lin Chan ◽  
Hseuh-An Yang ◽  
Liwei Lin ◽  
...  
Keyword(s):  
Quality Factor ◽  
Thermoelastic Damping ◽  
Micromechanical Resonators

A study of thermoelastic damping in micromechanical resonators under unified generalized thermoelasticity formulation

2019 ◽  
Vol 50 (6) ◽  
pp. 169-175 ◽  
Author(s):  
Roushan Kumar ◽  
Ravi Kumar
Keyword(s):  
Energy Dissipation ◽  
Generalized Thermoelasticity ◽  
Thermoelastic Damping ◽  
Micromechanical Resonators ◽  
Coupled Thermoelasticity ◽  
Governing System ◽  
Beam Height ◽  
Without Energy Dissipation ◽  
Thermoelasticity Type Iii ◽  
Thermoelasticity With Energy Dissipation

In this article, a unified formulation for the generalized coupled thermoelasticity theories by employing an appropriate system of partial differential equations as the governing system is presented to investigate thermoelastic damping of a microbeam resonator. The generalized coupled thermoelasticity theories namely: the extended thermoelasticity proposed by Lord and Shulman, the thermoelasticity without energy dissipation (thermoelasticity type-II) and the thermoelasticity with energy dissipation (thermoelasticity type III) in a unified way by introducing the unified parameters. An explicit formula of thermoelastic damping has been derived in a unified way and numerical results for effects of the beam height, relaxation time parameter on thermoelastic damping of the microbeam resonator have been studied and compared.

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