High-Resolution Deformation Mapping Across Large Fields of View Using Scanning Electron Microscopy and Digital Image Correlation

2018 ◽  
Vol 58 (9) ◽  
pp. 1407-1421 ◽  
Author(s):  
Z. Chen ◽  
W. Lenthe ◽  
J. C. Stinville ◽  
M. Echlin ◽  
T. M. Pollock ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
High Resolution ◽  
Digital Image Correlation ◽  
Digital Image ◽  
Image Correlation ◽  
Scanning Electron

A New Methodology to Analyze Instabilities in SEM Imaging

2014 ◽  
Vol 20 (6) ◽  
pp. 1625-1637 ◽  
Author(s):  
Catalina Mansilla ◽  
Václav Ocelík ◽  
Jeff T. M. De Hosson
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
Digital Image Correlation ◽  
Field Emission ◽  
Digital Image ◽  
Image Correlation ◽  
Ion Milling ◽  
Sem Imaging ◽  
Successive Generations ◽  
Scanning Electron

AbstractThis paper presents a statistical method to analyze instabilities that can be introduced during imaging in scanning electron microscopy (SEM). The method is based on the correlation of digital images and it can be used at different length scales. It consists of the evaluation of three different approaches with four parameters in total. The methodology is exemplified with a specific case of internal stress measurements where ion milling and SEM imaging are combined with digital image correlation. It is concluded that before these measurements it is important to test the SEM column to ensure the minimization and randomization of the imaging instabilities. The method has been applied onto three different field emission gun SEMs (Philips XL30, Tescan Lyra, FEI Helios 650) that represent three successive generations of SEMs. Important to note that the imaging instability can be quantified and its source can be identified.

scholarly journals Nanoscale Deformation Analysis With High-Resolution Transmission Electron Microscopy and Digital Image Correlation

2015 ◽  
Vol 82 (12) ◽  
Author(s):  
Xueju Wang ◽  
Zhipeng Pan ◽  
Feifei Fan ◽  
Jiangwei Wang ◽  
Yang Liu ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
High Resolution ◽  
Digital Image Correlation ◽  
Amorphous Silicon ◽  
Digital Image ◽  
Image Correlation ◽  
Deformation Analysis ◽  
Transmission Electron ◽  
Dic Technique

We present an application of the digital image correlation (DIC) method to high-resolution transmission electron microscopy (HRTEM) images for nanoscale deformation analysis. The combination of DIC and HRTEM offers both the ultrahigh spatial resolution and high displacement detection sensitivity that are not possible with other microscope-based DIC techniques. We demonstrate the accuracy and utility of the HRTEM-DIC technique through displacement and strain analysis on amorphous silicon. Two types of error sources resulting from the transmission electron microscopy (TEM) image noise and electromagnetic-lens distortions are quantitatively investigated via rigid-body translation experiments. The local and global DIC approaches are applied for the analysis of diffusion- and reaction-induced deformation fields in electrochemically lithiated amorphous silicon. The DIC technique coupled with HRTEM provides a new avenue for the deformation analysis of materials at the nanometer length scales.

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