Formation mechanism of multi-functional black silicon based on optimized deep reactive ion etching technique with SF6/C4F8

2015 ◽  
Vol 58 (2) ◽  
pp. 381-389 ◽  
Author(s):  
FuYun Zhu ◽  
XiaoSheng Zhang ◽  
HaiXia Zhang
Keyword(s):  
Formation Mechanism ◽  
Reactive Ion Etching ◽  
Black Silicon ◽  
Etching Technique ◽  
Ion Etching ◽  
Deep Reactive Ion Etching ◽  
Silicon Based

IR imaging using a cantilever-based focal plane array fabricated by deep reactive ion etching technique

2007 ◽  
Vol 91 (5) ◽  
pp. 054109 ◽  
Author(s):  
Xin Wang ◽  
Shenglin Ma ◽  
Xiaomei Yu ◽  
Ming Liu ◽  
Xiaohua Liu ◽  
...  
Keyword(s):  
Focal Plane ◽  
Reactive Ion Etching ◽  
Focal Plane Array ◽  
Etching Technique ◽  
Ion Etching ◽  
Deep Reactive Ion Etching ◽  
Ir Imaging

Optimized Deep Reactive-Ion Etching of Nanostructured Black Silicon for High-Contrast Optical Alignment Marks

2021 ◽  
Author(s):  
Maha Yusuf ◽  
George K. Herring ◽  
Lars Thorben Neustock ◽  
Mohammad Asif Zaman ◽  
Usha Raghuram ◽  
...  
Keyword(s):  
Reactive Ion Etching ◽  
Black Silicon ◽  
High Contrast ◽  
Ion Etching ◽  
Deep Reactive Ion Etching ◽  
Optical Alignment ◽  
Alignment Marks

Streamlined cryogenic deep reactive ion etching protocol for hybrid micronozzle arrays

2011 ◽  
Vol 21 (10) ◽  
pp. 105001
Author(s):  
Ahmet Erten ◽  
Milan Makale ◽  
Xuekun Lu ◽  
Bernd Fruhberger ◽  
Santosh Kesari ◽  
...  
Keyword(s):  
Reactive Ion Etching ◽  
Ion Etching ◽  
Deep Reactive Ion Etching
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