A three-step model of black silicon formation in Deep Reactive Ion Etching process

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2015.7050965 ◽

2015 ◽

Author(s):

Fuyun Zhu ◽

Chen Wang ◽

Xiaosheng Zhang ◽

Xin Zhao ◽

Haixia Zhang

Keyword(s):

Reactive Ion Etching ◽

Etching Process ◽

Black Silicon ◽

Ion Etching ◽

Deep Reactive Ion Etching ◽

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Modeling and simulation of the lag effect in a deep reactive ion etching process

Journal of Micromechanics and Microengineering ◽

10.1088/0960-1317/16/12/008 ◽

2006 ◽

Vol 16 (12) ◽

pp. 2570-2575 ◽

Author(s):

Yiyong Tan ◽

Rongchun Zhou ◽

Haixia Zhang ◽

Guizhang Lu ◽

Zhihong Li

Keyword(s):

Modeling And Simulation ◽

Reactive Ion Etching ◽

Etching Process ◽

Ion Etching ◽

Deep Reactive Ion Etching ◽

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A new deep reactive ion etching process by dual sidewall protection layer

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) ◽

10.1109/memsys.2000.838529 ◽

2002 ◽

Author(s):

J. Ohara ◽

K. Kano ◽

Y. Takeuchi ◽

N. Ohya ◽

Y. Otsuka ◽

...

Keyword(s):

Reactive Ion Etching ◽

Etching Process ◽

Ion Etching ◽

Deep Reactive Ion Etching ◽

Protection Layer

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Optimization of Cryogenic Deep Reactive Ion Etching Process for On-Chip Energy Storage

2019 42nd International Spring Seminar on Electronics Technology (ISSE) ◽

10.1109/isse.2019.8810293 ◽

2019 ◽

Author(s):

Jan Prasek ◽

David Houska ◽

Radim Hrdy ◽

Jaromir Hubalek ◽

Ulrich Schmid

Keyword(s):

Energy Storage ◽

Reactive Ion Etching ◽

Etching Process ◽

Ion Etching ◽

Deep Reactive Ion Etching ◽

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Prediction of new etch fronts in black silicon produced by cryogenic deep reactive ion etching

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) ◽

10.1109/transducers.2015.7180992 ◽

2015 ◽

Author(s):

D. Abi-Saab ◽

P. Basset ◽

M. J. Pierotti ◽

M. L. Trawick ◽

D. E. Angelescu

Keyword(s):

Reactive Ion Etching ◽

Black Silicon ◽

Ion Etching ◽

Deep Reactive Ion Etching

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Development of Direct Deep Reactive Ion Etching Process Using Laser Interference Lithographed Etch Barrier without Intermediate Layer

Japanese Journal of Applied Physics ◽

10.7567/jjap.52.10mc04 ◽

2013 ◽

Vol 52 (10S) ◽

pp. 10MC04 ◽

Author(s):

Soonkyu Je ◽

Jongmyeong Shim ◽

Joongeok Kim ◽

Minsoo Kim ◽

Jinhyung Lee ◽

...

Keyword(s):

Intermediate Layer ◽

Reactive Ion Etching ◽

Etching Process ◽

Laser Interference ◽

Ion Etching ◽

Deep Reactive Ion Etching

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Statistical key variable analysis and model-based control for improvement performance in a deep reactive ion etching process

Journal of Semiconductors ◽

10.1088/1674-4926/33/6/066002 ◽

2012 ◽

Vol 33 (6) ◽

pp. 066002

Author(s):

Shan Chen ◽

Tianhong Pan ◽

Zhengming Li ◽

Shi-Shang Jang

Keyword(s):

Reactive Ion Etching ◽

Etching Process ◽

Ion Etching ◽

Deep Reactive Ion Etching ◽

Model Based Control ◽

Model Based ◽

Variable Analysis

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Microfluidic device based on deep reactive ion etching process and its lag effect for single cell capture and extraction

Sensors and Actuators B Chemical ◽

10.1016/j.snb.2018.04.179 ◽

2018 ◽

Vol 269 ◽

pp. 288-292 ◽

Author(s):

Jianguo Feng ◽

Zdenka Fohlerová ◽

Xiaocheng Liu ◽

Honglong Chang ◽

Pavel Neužil

Keyword(s):

Single Cell ◽

Microfluidic Device ◽

Reactive Ion Etching ◽

Etching Process ◽

Cell Capture ◽

Ion Etching ◽

Deep Reactive Ion Etching ◽

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Fabrication of superhydrophobic wide-band “Black Silicon” by deep reactive ion etching

2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems ◽

10.1109/nems.2011.6017331 ◽

2011 ◽

Author(s):

Tian-Le Gao ◽

Xiao-Sheng Zhang ◽

Guang-Yi Sun ◽

Hai-Xia Zhang

Keyword(s):

Reactive Ion Etching ◽

Wide Band ◽

Black Silicon ◽

Ion Etching ◽

Deep Reactive Ion Etching

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Formation mechanism of multi-functional black silicon based on optimized deep reactive ion etching technique with SF6/C4F8

Science China Technological Sciences ◽

10.1007/s11431-014-5753-4 ◽

2015 ◽

Vol 58 (2) ◽

pp. 381-389 ◽

Author(s):

FuYun Zhu ◽

XiaoSheng Zhang ◽

HaiXia Zhang

Keyword(s):

Formation Mechanism ◽

Reactive Ion Etching ◽

Black Silicon ◽

Etching Technique ◽

Ion Etching ◽

Deep Reactive Ion Etching ◽

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Process for fabricating microactuator membranes of piezoelectric inkjet print head using multi‐step deep reactive ion etching process

Micro & Nano Letters ◽

10.1049/mnl.2016.0805 ◽

2017 ◽

Vol 12 (7) ◽

pp. 482-485

Author(s):

Wenqiang Wang ◽

Chen Li ◽

Wencai Xu ◽

Helin Zou

Keyword(s):

Reactive Ion Etching ◽

Etching Process ◽

Ion Etching ◽

Deep Reactive Ion Etching ◽

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