Scalability of dry-etch processing for small unit-cell HgCdTe focal-plane arrays

2003 ◽  
Vol 32 (7) ◽  
pp. 821-826 ◽  
Author(s):  
E. P. G. Smith ◽  
G. M. Venzor ◽  
P. M. Goetz ◽  
J. B. Varesi ◽  
L. T. Pham ◽  
...  
Keyword(s):  
Focal Plane ◽  
Unit Cell ◽  
Focal Plane Arrays ◽  
Small Unit ◽  
Dry Etch ◽  
Small Unit Cell

Development of small unit cell avalanche photodiodes for UV imaging applications

2012 ◽  
Author(s):  
Ashok K. Sood ◽  
Roger E. Welser ◽  
Robert A. Richwine ◽  
Yash R. Puri ◽  
Russell D. Dupuis ◽  
...  
Keyword(s):  
Avalanche Photodiodes ◽  
Unit Cell ◽  
Small Unit ◽  
Uv Imaging ◽  
Small Unit Cell

X-Ray Contributions to the Problem of Polymerization

1929 ◽  
Vol 2 (2) ◽  
pp. 285-300
Author(s):  
George L. Clark
Keyword(s):  
Unit Cell ◽  
Small Unit ◽  
X Ray ◽  
Cell Dimensions ◽  
Unit Cell Dimensions ◽  
Small Unit Cell

Abstract It may be readily admitted that x-ray studies of the problem of polymerization are only in their beginning. Some complexities—as, for example, small unit cell dimensions— have been added, but in general a real contribution has already been made as a basis for further advances, which will come as knowledge of interpretation increases and as experimental technic improves.

Two small unit cell models for prediction of thermal properties of 8-harness satin woven pierced composites

2018 ◽  
Vol 135 ◽  
pp. 218-231 ◽  
Author(s):  
Jian-Jun Gou ◽  
Xing-Jie Ren ◽  
Wen-Zhen Fang ◽  
Shuguang Li ◽  
Wen-Quan Tao
Keyword(s):  
Thermal Properties ◽  
Unit Cell ◽  
Cell Models ◽  
Small Unit ◽  
Small Unit Cell

scholarly journals Extending holographic LEED to ordered small-unit-cell superstructures

1998 ◽  
Vol 58 (7) ◽  
pp. 4102-4110 ◽  
Author(s):  
K. Reuter ◽  
J. A. Vamvakas ◽  
D. K. Saldin ◽  
V. Blum ◽  
M. Ott ◽  
...  
Keyword(s):  
Unit Cell ◽  
Small Unit ◽  
Small Unit Cell

New unit cell of current mirroring direct injection circuit for focal plane arrays

1997 ◽  
Author(s):  
Nanyoung Yoon ◽  
Byunghyuck Kim ◽  
Hee Chul Lee ◽  
Hyungchul Shin ◽  
Choong-Ki Kim
Keyword(s):  
Focal Plane ◽  
Direct Injection ◽  
Unit Cell ◽  
Focal Plane Arrays

Application of polyimide sacrificial layers for the manufacturing of uncooled double-cantilever microbolometers

2005 ◽  
Vol 890 ◽  
Author(s):  
Shusen Huang ◽  
Xin Zhang
Keyword(s):  
Focal Plane ◽  
Silicon Oxide ◽  
Chemical Vapor ◽  
Focal Plane Arrays ◽  
Mask Layer ◽  
Chemical Vapor Deposited ◽  
Sacrificial Etching ◽  
Sacrificial Layers ◽  
Dry Etch ◽  
Temperature Surface

ABSTRACTIn this paper, a low-temperature surface micromachining module with two sacrificial layers of polyimide is developed for the manufacturing of double-cantilever microbolometer focal plane arrays. The use of spin-on polyimide allows an all-dry final release step overcoming stiction problems often encountered in wet sacrificial etching processes. For the patterning of the polyimide, a plasma-enhanced chemical vapor deposited silicon oxide is employed as a mask layer. Anisotropic etching of both the mask film and the polyimide layer is accomplished by reactive ion etching. After patterning structural layers, sacrificial etching of the polyimide is conducted using an isotropic dry etch process in high-density oxygen plasma.

scholarly journals The small unit cell reconstructions of SrTiO3(111)

2009 ◽  
Vol 603 (14) ◽  
pp. 2179-2187 ◽  
Author(s):  
Laurence D. Marks ◽  
Ann N. Chiaramonti ◽  
Fabien Tran ◽  
Peter Blaha
Keyword(s):  
Unit Cell ◽  
Small Unit ◽  
Small Unit Cell

Solving Defect Structures by Hrtem: Expectations and Limitations

1990 ◽  
Vol 183 ◽  
Author(s):  
John C. Barry
Keyword(s):  
Heavy Atom ◽  
Unit Cell ◽  
Bragg Diffraction ◽  
Defect Structures ◽  
Phase Object ◽  
Atom Type ◽  
Small Unit ◽  
Weak Phase ◽  
Unit Cells ◽  
Small Unit Cell

AbstractMost metals have small unit cells, and in small unit-cell materials in low-index zones the strength of the diffracted beams is often greater for lighter metals than it is for heavier metals. The reason for this is that the strong double-diffraction in heavy metals gives rise to weak Bragg diffraction. In this paper it is shown that for small unit-cell materials, light atom precipitates can be easily detected in heavy atom matrices; and that in large unit-cell materials, the breakdown in the weak-phase-object approximation in thick crystals can be used to identify atom type at defects.

Sign in / Sign up

Export Citation Format

Share Document